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公开(公告)号:US20230098563A1
公开(公告)日:2023-03-30
申请号:US17952125
申请日:2022-09-23
Inventor: Houssein ELMI DAWALE , Franck BADETS , Sébastien HENTZ , Guillaume JOURDAN , Marc SANSA PERNA , Loïc SIBEUD
IPC: G01N21/17
Abstract: A detecting device configured to detect chemical or biological species in a given environment, includes a matrix-array sensor formed from opto-mechanical discs that are optically and mechanically resonant, able to bind to species of the environment, and arranged in rows and columns. The opto-mechanical discs of a given row are optically coupled to the same optical waveguide. Actuating electrodes are provided in order to ensure the mechanical resonance of the opto-mechanical discs. One p-n junction is associated with each opto-mechanical disc, the junctions of a given column being electrically connected to the same biasing electrode, so as to block the flow through the corresponding opto-mechanical disc of a parasitic electrical current. A control circuit is configured to forward bias, during a time window of read-out of a disc of interest, the p-n junction of a disc of interest so as to place, via a thermo-optical effect, its resonant wavelength at a working wavelength, such that an optical signal propagating through the optical waveguide associated with the disc of interest is amplitude modulated.
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公开(公告)号:US20220411257A1
公开(公告)日:2022-12-29
申请号:US17846992
申请日:2022-06-22
Inventor: Guillaume JOURDAN , Sébastien HENTZ , Fabrice-Roland LAMBERTI
Abstract: A MEMs and/or NEMs measurement system includes a resonant assembly comprising: an input and an output, a plurality of N optical resonators Ri indexed i each having a resonance wavelength λr,i, at least one waveguide to which the optical resonators are coupled, at least one element coupled to each resonator Ri, an emission device, a modulation device, an injection device configured to superpose the N light beams to form an input beam and to inject the beam as input to the resonant assembly, at least one detector configured to detect a light beam arising from the beam at the output of the resonant assembly and to generate an output signal, a demodulation device comprising at least N synchronous-detection demodulation modules.
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公开(公告)号:US20210132106A1
公开(公告)日:2021-05-06
申请号:US17087805
申请日:2020-11-03
Inventor: Martial DEFOORT , Marc SANSA PERNA , Sébastien HENTZ
IPC: G01P15/125 , G01P15/08
Abstract: Microelectromechanical accelerometer comprising a support (2) and a mobile portion (4) able to be vibrated, means for measuring (10) the amplitude of the vibration of said mobile portion (4) in at least one detection direction of the plane of the accelerometer. The accelerometer comprises at least one foot (6) anchored on the support (2) by a first end and fixed to the mobile portion (4) by a second end, and allowing the mobile portion (4) to vibrate at least along said at least one detection direction under the effect of an acceleration force.
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公开(公告)号:US20170370975A1
公开(公告)日:2017-12-28
申请号:US15189967
申请日:2016-06-22
Inventor: Marc SANSA PERNA , Sébastien HENTZ , Guillaume JOURDAN
CPC classification number: G01R23/15 , B81B3/0032 , B81B2201/0271 , G01R29/26 , H03J3/12
Abstract: A method of characterizing frequency fluctuations of a resonator comprising the steps of: a) driving the resonator, in a linear regime, by simultaneously applying two periodical driving signals having respective frequencies, the frequencies being different from each other and from a resonant frequency of the resonator, but contained within a resonance linewidth thereof; b) performing simultaneous measurements of response signal of the resonator at the frequencies of the periodical driving signal; and c) computing a value representative of a correlation between the measurements, the value being indicative of frequency fluctuations of the resonator. An apparatus for implementing such a method is provided.
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