公开(公告)号：US11609261B2

公开(公告)日：2023-03-21

申请号：US17337954

申请日：2021-06-03

Applicant: CHROMA ATE INC.

Inventor： Wei-Chih Chen ,  Ben-Mou Yu ,  Yi-Yen Lin

IPC: G01R31/26 ,  G01N21/95 ,  G01R31/28

Abstract: A wafer inspection system and a wafer inspection equipment thereof are provided. The wafer inspection system includes a susceptor device, probe card, and bridge module. The susceptor device includes a susceptor unit for placing a wafer under test. The probe card includes a probing portion and conducting portion. The conducting portion is disposed at the periphery of the probing portion and has a contact surface. The bridge module includes transmission units extended upward, positioned adjacent to a wafer placement area, and coupled to the susceptor unit. When the probing portion comes into contact with a testing point of the wafer, the contact surface of the conducting portion gets coupled to the transmission units to transmit a test signal to the probe card via the transmission units and conducting portion and thus form a test loop. Thus, the test loop path can be shortened and the accuracy of signal transmission and inspection can be enhanced.