公开(公告)号：US20190145762A1

公开(公告)日：2019-05-16

申请号：US16190112

申请日：2018-11-13

Applicant: CHROMA ATE INC.

Inventor： Yi-Chang CHIU ,  Cheng-Ting TSAI ,  Shih-Yao PAN ,  Lan-Sheng YANG ,  Hsiu-Wei KUO ,  Shao-En CHUNG

IPC: G01B11/30 ,  G01N21/51

CPC classification number: G01B11/303 ,  G01N21/51 ,  G01N21/958 ,  G01N2021/4735

Abstract: A surface measurement system is configured to measure a sample with a low reflectivity surface. The surface measurement system includes a condensation device and a measurement device. The condensation device is configured to form a liquid layer on the surface of the sample. The condensation device includes a chamber, a temperature controlling gas source, and a humidification gas source. The chamber is configured to accommodate the sample. The temperature controlling gas source is connected to the chamber to provide temperature controlling gases to the chamber, so as to control the temperature of the sample. The humidification gas source is connected to the chamber to provide water vapor to the chamber, so as to form the liquid layer on the surface of the sample. The measurement device includes a plate, a light source, and an image capturing device.