公开(公告)号：US20200166445A1

公开(公告)日：2020-05-28

申请号：US16676458

申请日：2019-11-07

Applicant: CHROMA ATE INC.

Inventor： Cheng-Ting TSAI ,  Lan-Sheng YANG ,  Shao-En CHUNG

IPC: G01N13/00

Abstract: A condensing system is used to generate a condensing layer on a surface of a test object. The condensing system includes airflow generating device and a passage device. The airflow generating device is used to generate condensing airflow. The condensing airflow has a dew point higher than a temperature of the surface of the test object. The passage device is connected to the airflow generating device, and the condensing airflow flows from the airflow generating device into the passage device. The passage device includes a flow-uniforming module. The flow-uniforming module includes at least one uniforming board. Each of the at least one uniforming board has at least a first hole.

公开(公告)号：US20190145762A1

公开(公告)日：2019-05-16

申请号：US16190112

申请日：2018-11-13

Applicant: CHROMA ATE INC.

Inventor： Yi-Chang CHIU ,  Cheng-Ting TSAI ,  Shih-Yao PAN ,  Lan-Sheng YANG ,  Hsiu-Wei KUO ,  Shao-En CHUNG

IPC: G01B11/30 ,  G01N21/51

CPC classification number: G01B11/303 ,  G01N21/51 ,  G01N21/958 ,  G01N2021/4735

Abstract: A surface measurement system is configured to measure a sample with a low reflectivity surface. The surface measurement system includes a condensation device and a measurement device. The condensation device is configured to form a liquid layer on the surface of the sample. The condensation device includes a chamber, a temperature controlling gas source, and a humidification gas source. The chamber is configured to accommodate the sample. The temperature controlling gas source is connected to the chamber to provide temperature controlling gases to the chamber, so as to control the temperature of the sample. The humidification gas source is connected to the chamber to provide water vapor to the chamber, so as to form the liquid layer on the surface of the sample. The measurement device includes a plate, a light source, and an image capturing device.