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公开(公告)号:US11784159B2
公开(公告)日:2023-10-10
申请号:US17315279
申请日:2021-05-08
发明人: Jan-hsiang Yang , Kai-yi Wu , Chia-hui Shen , Jen-chieh Chiang
IPC分类号: H01L23/00 , H01L33/00 , H01L25/075 , H01L33/32
CPC分类号: H01L24/75 , H01L24/83 , H01L24/97 , H01L25/0753 , H01L33/0093 , H01L33/32 , H01L2224/75724 , H01L2224/75744 , H01L2224/75754 , H01L2224/83005 , H01L2224/83136 , H01L2224/83192 , H01L2224/95001 , H01L2224/951 , H01L2224/95136
摘要: Provided are a mass transfer device and a mass transfer method. The mass transfer device is provided with multiple channels, a first opening of each channel is arranged on a first surface of the mass transfer device, a second opening of each channel is arranged on a second surface of the mass transfer device, and the distances between the channels are gradually increased along a direction from the first surface to the second surface. In the provided mass transfer method, through a laser irradiation mode, the Micro-LEDs are separated from the first substrate and enter the channels of the mass transfer device through the first openings, and falling into Micro-LED to-be-installed positions on a second substrate through the second openings of the channels, thereby transferring the Micro-LEDs from the first substrate to the second substrate.