公开(公告)号：US20130199719A1

公开(公告)日：2013-08-08

申请号：US13754216

申请日：2013-01-30

Applicant: CANON KABUSHIKI KAISHA

Inventor： Go TSUCHIYA ,  Tomoyuki MORITA

IPC: H01J37/30

CPC classification number: H01J37/3007 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/1474 ,  H01J37/302 ,  H01J37/3177 ,  H01J2237/043 ,  H01J2237/30488

Abstract: A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking device configured to individually blank the plurality of charged particle beams; a scanning deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate; and a controller configured to generate a periodic signal to control a periodic deflection operation of the plurality of charged particle beams by the scanning deflector. The controller is configured to adjust an amount of deflection of the plurality of charged particle beams by the scanning deflector in a period of the periodic signal so that a scanning speed of the plurality of charged particle beams becomes a target speed.

Abstract translation: 一种利用多个带电粒子束在基板上进行绘图的绘图装置包括：消隐装置，被配置为分别对多个带电粒子束进行空白; 扫描偏转器，被配置为偏转所述多个带电粒子束以扫描所述基底上的所述多个带电粒子束; 以及控制器，被配置为产生周期信号以控制由扫描偏转器引起的多个带电粒子束的周期性偏转操作。 控制器被配置为在周期信号的周期中通过扫描偏转器来调整多个带电粒子束的偏转量，使得多个带电粒子束的扫描速度成为目标速度。

公开(公告)号：US20150090896A1

公开(公告)日：2015-04-02

申请号：US14488710

申请日：2014-09-17

Applicant: CANON KABUSHIKI KAISHA

Inventor： Go TSUCHIYA ,  Kazuya KIKUCHI

IPC: H01J37/04 ,  H01J37/302 ,  H01J37/317

CPC classification number: H01J37/045 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/30455

Abstract: The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, the apparatus comprising two blanker arrays each including a plurality of first blankers which blank a plurality of charged particle beams individually and a plurality of second blankers which blank a plurality of charged particle beams in common, wherein the plurality of first blankers and the plurality of second blankers in each of the two blanker arrays are arranged such that one of the plurality of charged particle beams passes through corresponding one of the plurality of first blankers of one of the two blanker arrays and corresponding one of the plurality of second blankers of the other of the two blanker arrays.

Abstract translation: 本发明提供了一种在多个带电粒子束的基板上进行绘图的绘图装置，该装置包括两个消隐器阵列，每个消隐器阵列包括多个单独消除多个带电粒子束的第一消隐器和多个第二消隐器， 空白多个带电粒子束，其中，两个消隐器阵列中的每一个中的多个第一消隐器和多个第二消隐器被布置成使得多个带电粒子束中的一个穿过多个第一 两个消隐器阵列之一的消隐器和两个消隐器阵列中的另一个的多个第二消隐器中的相应一个。

公开(公告)号：US20150001419A1

公开(公告)日：2015-01-01

申请号：US14302885

申请日：2014-06-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Masato MURAKI ,  Go TSUCHIYA

IPC: H01J37/30 ,  H01J37/20

CPC classification number: H01J37/3177 ,  H01J37/3026 ,  H01J2237/31764

Abstract: A drawing apparatus includes: a plurality of charged particle optical systems arranged along a first direction; a storage configured to store drawing data shared by the plurality of charged particle optical systems with respect to each of sub-drawing regions obtained by dividing a drawing region on the substrate of each of the plurality of charged particle optical systems in the first direction; and a controller configured to determine a drawing region on the substrate by each of the plurality of charged particle optical systems as a set of the sub-drawing regions and control each of the plurality of charged particle optical systems based on a corresponding set of the sub-drawing regions.

Abstract translation: 一种绘图装置包括：沿第一方向布置的多个带电粒子光学系统; 存储器，被配置为存储由所述多个带电粒子光学系统共享的绘图数据，所述绘制数据相对于通过沿所述第一方向划分所述多个带电粒子光学系统中的每一个的所述基板上的绘制区域而获得的每个子绘制区域; 以及控制器，其被配置为通过所述多个带电粒子光学系统中的每一个确定所述衬底上的绘图区域作为所述子绘图区域的集合，并且基于所述子组的相应组来控制所述多个带电粒子光学系统中的每一个 绘制区域。

公开(公告)号：US20140057212A1

公开(公告)日：2014-02-27

申请号：US13970652

申请日：2013-08-20

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shinji OHISHI ,  Kimitaka OZAWA ,  Go TSUCHIYA

IPC: H01J37/30 ,  F21V8/00

CPC classification number: H01J37/3007 ,  G02B6/0005 ,  G02B6/264 ,  G02B6/3644 ,  G02B6/3672 ,  H01J37/302 ,  H01J37/3177 ,  H01J2237/16 ,  H01J2237/2482

Abstract: The present invention provides a transmission apparatus for transmitting a light signal between an outside and an inside of a vacuum chamber, comprising a plurality of first transmission lines configured to transmit a plurality of light signals outside the vacuum chamber, a plurality of second transmission lines configured to transmit the plurality of light signals inside the vacuum chamber, and a light-transmissive member configured to transmit the light signals between the plurality of first transmission lines and the plurality of second transmission lines, wherein the light-transmissive member has a structure formed to isolate light paths of the plurality of light signals between the plurality of first transmission lines and the plurality of second transmission lines from each other.

Abstract translation: 本发明提供了一种用于在真空室的外部和内部之间传输光信号的传输装置，包括：多个第一传输线，被配置为在真空室外传输多个光信号，多个第二传输线配置 在所述真空室内透过所述多个光信号，以及透光构件，被配置为在所述多个第一传输线与所述多个第二传输线之间传输光信号，其中，所述透光构件具有形成为 将多个第一传输线与多条第二传输线之间的多个光信号的光路彼此隔离。