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公开(公告)号：US20190096726A1
公开(公告)日：2019-03-28
申请号：US16201899
申请日：2018-11-27
IPC分类号： H01L21/677 , H01L21/687 , B25J18/00 , B25J9/04
摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
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公开(公告)号：US10903104B2
公开(公告)日：2021-01-26
申请号：US16201899
申请日：2018-11-27
IPC分类号： H01L21/67 , H01L21/677 , B25J9/04 , H01L21/687 , B25J18/00
摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
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公开(公告)号：US10141214B2
公开(公告)日：2018-11-27
申请号：US14868689
申请日：2015-09-29
IPC分类号： H01L21/677 , B25J9/04 , H01L21/687 , B25J18/00
摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
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公开(公告)号：US09147590B2
公开(公告)日：2015-09-29
申请号：US13768495
申请日：2013-02-15
IPC分类号： H01L21/677 , B25J9/04 , H01L21/687
CPC分类号： H01L21/67742 , B25J9/042 , B25J9/043 , B25J18/00 , H01L21/677 , H01L21/68707 , Y10S901/15 , Y10S901/27 , Y10T74/20305
摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
摘要翻译： 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。
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公开(公告)号：US20160020126A1
公开(公告)日：2016-01-21
申请号：US14868689
申请日：2015-09-29
IPC分类号： H01L21/677 , B25J18/00 , B25J9/04
CPC分类号： H01L21/67742 , B25J9/042 , B25J9/043 , B25J18/00 , H01L21/677 , H01L21/68707 , Y10S901/15 , Y10S901/27 , Y10T74/20305
摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
摘要翻译： 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。
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公开(公告)号：US20140056678A1
公开(公告)日：2014-02-27
申请号：US13768495
申请日：2013-02-15
IPC分类号： H01L21/677
CPC分类号： H01L21/67742 , B25J9/042 , B25J9/043 , B25J18/00 , H01L21/677 , H01L21/68707 , Y10S901/15 , Y10S901/27 , Y10T74/20305
摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
摘要翻译： 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。
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