发明授权
- 专利标题： Dual scara arm
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申请号： US14868689申请日： 2015-09-29
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公开(公告)号： US10141214B2公开(公告)日： 2018-11-27
- 发明人: Antonio F. Pietrantonio , Anthony Chesna , Hakan Elmali , Ulysses Gilchrist
- 申请人： Brooks Automation, Inc.
- 申请人地址： US MA Chelmsford
- 专利权人： Brooks Automation, Inc.
- 当前专利权人： Brooks Automation, Inc.
- 当前专利权人地址： US MA Chelmsford
- 代理机构： Perman & Green, LLP
- 代理商 Colin C. Durham
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B25J9/04 ; H01L21/687 ; B25J18/00
摘要：
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
公开/授权文献
- US20160020126A1 DUAL SCARA ARM 公开/授权日：2016-01-21
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