公开(公告)号：US08901924B2

公开(公告)日：2014-12-02

申请号：US13031558

申请日：2011-02-21

申请人： Bradley Engel ,  Phillip Mather

发明人： Bradley Engel ,  Phillip Mather

IPC分类号： G01R33/02 ,  G01R33/09 ,  B82Y25/00

CPC分类号： G01R33/098 ,  B82Y25/00 ,  G01R33/0023 ,  G01R33/09 ,  G01R33/093

摘要： A semiconductor process and apparatus provide a high-performance magnetic field sensor with three differential sensor configurations which require only two distinct pinning axes, where each differential sensor is formed from a Wheatstone bridge structure with four unshielded magnetic tunnel junction sensor arrays, each of which includes a magnetic field pulse generator for selectively applying a field pulse to stabilize or restore the easy axis magnetization of the sense layers to orient the magnetization in the correct configuration prior to measurements of small magnetic fields. The field pulse is sequentially applied to groups of the sense layers of the Wheatstone bridge structures, thereby allowing for a higher current pulse or larger sensor array size for maximal signal to noise ratio.

摘要翻译： 半导体工艺和设备提供具有三个差分传感器配置的高性能磁场传感器，其仅需要两个不同的钉扎轴，其中每个差分传感器由具有四个非屏蔽磁隧道结传感器阵列的惠斯登电桥结构形成，每个包括 磁场脉冲发生器，用于选择性地施加场脉冲以稳定或恢复感测层的易轴磁化，以在小磁场测量之前以正确的配置定向磁化。 场脉冲顺序地施加到惠斯登电桥结构的感测层的组，从而允许更高的电流脉冲或更大的传感器阵列尺寸以获得最大的信噪比。

公开(公告)号：US08518734B2

公开(公告)日：2013-08-27

申请号：US12751927

申请日：2010-03-31

申请人： Renu Whig ,  Phillip Mather ,  Kenneth Smith ,  Sanjeev Aggarwal ,  Jon Slaughter ,  Nicholas Rizzo

发明人： Renu Whig ,  Phillip Mather ,  Kenneth Smith ,  Sanjeev Aggarwal ,  Jon Slaughter ,  Nicholas Rizzo

IPC分类号： H01L27/20 ,  H01L41/06 ,  G01R33/02

CPC分类号： H01L43/12 ,  B82Y25/00 ,  G01R33/0052 ,  G01R33/09 ,  G01R33/093 ,  G01R33/098 ,  H01L27/22 ,  H01L43/02 ,  H01L43/08

摘要： A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.

摘要翻译： 半导体工艺集成了三个桥接电路，每个电路包括在单个芯片上作为惠斯登电桥耦合的磁阻传感器，以在三个正交方向上感测磁场。 该过程包括形成磁阻传感器的各种沉积和蚀刻步骤以及在三个桥接电路中的一个上的多个通量引导器，用于将“Z”轴磁场传送到在XY平面中定向的传感器上。

公开(公告)号：US08890266B2

公开(公告)日：2014-11-18

申请号：US13211118

申请日：2011-08-16

申请人： Phillip Mather ,  Jon Slaughter ,  Nicholas Rizzo

发明人： Phillip Mather ,  Jon Slaughter ,  Nicholas Rizzo

IPC分类号： H01L29/82 ,  G01R33/09 ,  H01L27/22 ,  H01L43/08 ,  H01L43/12

CPC分类号： H01L43/02 ,  G01R33/098 ,  H01L27/22 ,  H01L43/08 ,  H01L43/12

摘要： A magnetic sensor includes a plurality of groups, each group comprising a plurality of magnetic tunnel junction (MTJ) devices having a plurality of conductors configured to couple the MTJ devices within one group in parallel and the groups in series enabling independent optimization of the material resistance area (RA) of the MTJ and setting total device resistance so that the total bridge resistance is not so high that Johnson noise becomes a signal limiting concern, and yet not so low that CMOS elements may diminish the read signal. Alternatively, the magnetic tunnel junction devices within each of at least two groups in series and the at least two groups in parallel resulting in the individual configuration of the electrical connection path and the magnetic reference direction of the reference layer, leading to independent optimization of both functions, and more freedom in device design and layout. The X and Y pitch of the sense elements are arranged such that the line segment that stabilizes, for example, the right side of one sense element; also stabilizes the left side of the adjacent sense element.

摘要翻译： 磁传感器包括多个组，每个组包括多个磁隧道结（MTJ）装置，其具有多个导体，其被配置成并联连接一组内的MTJ装置，并且该组可串联实现材料电阻的独立优化 面积（RA），并设置总的器件电阻，使得总的桥接电阻不是很高，以至于Johnson噪声成为限制信号的关键，而不是那么低，使得CMOS元件可能会削弱读取信号。 或者，串联的至少两组中的每一个中的磁隧道结装置和并联的至少两个组，导致电连接路径的单独配置和参考层的磁参考方向，导致两者的独立优化 功能，以及更多设备设计和布局自由。 感测元件的X和Y间距被布置成使得例如稳定一个感测元件的右侧的线段; 也稳定了相邻感测元件的左侧。

公开(公告)号：US08508221B2

公开(公告)日：2013-08-13

申请号：US12870970

申请日：2010-08-30

申请人： Jijun Sun ,  Phillip Mather ,  Srinivas Pietambaram ,  Jon Slaughter ,  Renu Whig ,  Nicholas Rizzo

发明人： Jijun Sun ,  Phillip Mather ,  Srinivas Pietambaram ,  Jon Slaughter ,  Renu Whig ,  Nicholas Rizzo

IPC分类号： G01R33/02 ,  H01R43/00

CPC分类号： H01L43/10 ,  G01R33/098 ,  H01L43/12 ,  Y10T29/49117

摘要： A sensor and fabrication process are provided for forming reference layers with substantially orthogonal magnetization directions having zero offset with a small compensation angle. An exemplary embodiment includes a sensor layer stack of a magnetoresistive thin-film based magnetic field sensor, the sensor layer stack comprising a pinning layer; a pinned layer including a layer of amorphous material over the pinning layer, and a first layer of crystalline material over the layer of amorphous material; a nonmagnetic coupling layer over the pinned layer; a fixed layer over the nonmagnetic coupling layer; a tunnel barrier over the fixed layer; and a sense layer over the nonmagnetic intermediate layer. Another embodiment includes a sensor layer stack where a pinned layer including two crystalline layers separated by a amorphous layer.

摘要翻译： 提供传感器和制造工艺，用于形成具有基本上正交的磁化方向的参考层，具有零偏移并具有小的补偿角。 示例性实施例包括基于磁阻薄膜的磁场传感器的传感器层堆叠，传感器层堆叠包括钉扎层; 包括在钉扎层上的无定形材料层的钉扎层和在非晶材料层上的第一层结晶材料; 在被钉扎层上的非磁性耦合层; 在非磁耦合层上的固定层; 固定层上的隧道势垒; 以及在非磁性中间层上的感测层。 另一个实施例包括传感器层堆叠，其中包括由非晶层隔开的两个结晶层的钉扎层。

公开(公告)号：US11237231B2

公开(公告)日：2022-02-01

申请号：US16957719

申请日：2018-12-20

申请人： Robert Bosch GmbH ,  Anuraag Mohan ,  Phillip Mather ,  Guido De Sandre

发明人： Anuraag Mohan ,  Phillip Mather ,  Guido De Sandre

IPC分类号： G01R33/09

摘要： An out-of-plane tunneling magnetoresistive (TMR) magnetic field sensor includes a sense element that defines a sense plane and a flux guide configured to direct a magnetic field perpendicular to the sense plane into the sense plane. The magnetic field sensor further includes a first coil arranged in a first plane, a second coil electrically insulated from the first coil and arranged in a spaced-apart second plane, and drive circuitry operatively connected to the first coil and the second coil. The drive circuitry in a first mode energizes the first and second coils to generate respective first and second fields that combine to set a magnetization of the flux guide. The drive circuitry in a second mode energizes only the first coil to generate the first field so as to set a magnetization of the sense element without changing the magnetization of the flux guide.

公开(公告)号：US20120193736A1

公开(公告)日：2012-08-02

申请号：US13211118

申请日：2011-08-16

申请人： Phillip Mather ,  Jon Slaughter ,  Nicholas Rizzo

发明人： Phillip Mather ,  Jon Slaughter ,  Nicholas Rizzo

IPC分类号： H01L29/82 ,  H01L21/02

CPC分类号： H01L43/02 ,  G01R33/098 ,  H01L27/22 ,  H01L43/08 ,  H01L43/12

摘要： A magnetic sensor includes a plurality of groups, each group comprising a plurality of magnetic tunnel junction (MTJ) devices having a plurality of conductors configured to couple the MTJ devices within one group in parallel and the groups in series enabling independent optimization of the material resistance area (RA) of the MTJ and setting total device resistance so that the total bridge resistance is not so high that Johnson noise becomes a signal limiting concern, and yet not so low that CMOS elements may diminish the read signal. Alternatively, the magnetic tunnel junction devices within each of at least two groups in series and the at least two groups in parallel resulting in the individual configuration of the electrical connection path and the magnetic reference direction of the reference layer, leading to independent optimization of both functions, and more freedom in device design and layout. The X and Y pitch of the sense elements are arranged such that the line segment that stabilizes, for example, the right side of one sense element; also stabilizes the left side of the adjacent sense element.

摘要翻译： 磁传感器包括多个组，每个组包括多个磁隧道结（MTJ）装置，其具有多个导体，其被配置成并联连接一组内的MTJ装置，并且该组可串联实现材料电阻的独立优化 面积（RA），并设置总的器件电阻，使得总的桥接电阻不是很高，以至于Johnson噪声成为限制信号的关键，而不是那么低，使得CMOS元件可能会削弱读取信号。 或者，串联的至少两组中的每一个中的磁隧道结装置和并联的至少两个组，导致电连接路径的单独配置和参考层的磁参考方向，导致两者的独立优化 功能，以及更多设备设计和布局自由。 感测元件的X和Y间距被布置成使得例如稳定一个感测元件的右侧的线段; 也稳定了相邻感测元件的左侧。

公开(公告)号：US20110169488A1

公开(公告)日：2011-07-14

申请号：US12684692

申请日：2010-01-08

申请人： Phillip Mather

发明人： Phillip Mather

IPC分类号： G01R33/02

CPC分类号： G01R33/098 ,  G01R33/0035

摘要： A method of sensing a magnetic field including at least one magnetoresistive sensing element (100) in a circuit (101) includes supplying (702) a first plurality of currents to a stabilization line (116) disposed adjacent the magnetoresistive sensing element (100), applying (704) a second plurality of currents to a self test line (120) disposed adjacent the magnetic tunnel junction (100), one each of the first plurality of currents being supplied during one each of the second plurality of currents. Values sensed by the magnetic tunnel junction sensing element (100) in response to the supplying (702) of the first plurality of currents and the applying (704) of the second plurality of currents are sampled (706) and the sensitivity of the magnetic tunnel junction sensor (100) and electrical and magnetic offset are determined (708) from the sampled values. The temperature coefficient of offset may also be determined.

摘要翻译： 一种感测包括电路（101）中的至少一个磁阻感测元件（100）的磁场的方法包括：向邻近磁阻感测元件（100）设置的稳定线（116）提供（702）第一多个电流（702） 将第二多个电流施加（704）到邻近所述磁性隧道结（100）设置的自测试线（120），所述第一多个电流中的每一个在所述第二多个电流中的每一个期间被提供。 由磁隧道结感测元件（100）响应于第一多个电流的供应（702）和第二多个电流的施加（704）感测的值被采样（706），并且磁通道 结点传感器（100）以及电和磁偏移量从采样值确定（708）。 也可以确定偏移的温度系数。

公开(公告)号：US09279865B2

公开(公告)日：2016-03-08

申请号：US13467175

申请日：2012-05-09

申请人： Lianjun Liu ,  Phillip Mather

发明人： Lianjun Liu ,  Phillip Mather

IPC分类号： G01R35/00 ,  G01R33/09 ,  G01R33/00 ,  G01R33/02

CPC分类号： G01R33/09 ,  G01R33/0035 ,  G01R33/0206 ,  G01R33/093 ,  G01R35/00 ,  G01R35/005

摘要： A structure and method are provided for self-test of a Z axis sensor. Two self-test current lines are symmetrically positioned adjacent, but equidistant from, each sense element. The vertical component of the magnetic field created from a current in the self-test lines is additive in a flux guide positioned adjacent, and orthogonal to, the sense element; however, the components of the magnetic fields in the plane of the sense element created by each of the two self-test current line pairs cancel one another at the sense element center, resulting in only the Z axis magnetic field being sensed during the self-test.

摘要翻译： 提供了一种用于Z轴传感器自检的结构和方法。 两条自测电流线对称地定位在与每个感测元件相邻但等距离的位置。 由自检线中的电流产生的磁场的垂直分量在与感测元件相邻并正交的定向磁通导向器中是相加的; 然而，由两个自检电流线对中的每一个产生的感测元件的平面中的磁场的分量在感测元件中心彼此抵消，导致在自适应期间仅感测到Z轴磁场， 测试。

公开(公告)号：US09035671B2

公开(公告)日：2015-05-19

申请号：US13529065

申请日：2012-06-21

申请人： Lianjun Liu ,  Phillip Mather

发明人： Lianjun Liu ,  Phillip Mather

IPC分类号： G01R1/00 ,  G01R35/00 ,  G01R33/00 ,  G01R33/09

CPC分类号： G01R1/07307 ,  G01R33/0035 ,  G01R33/09 ,  G01R35/00

摘要： A probe card and method are provided for testing magnetic sensors at the wafer level. The probe card has one or more probe tips having a first pair of solenoid coils in parallel configuration on first opposed sides of each probe tip to supply a magnetic field in a first (X) direction, a second pair of solenoid coils in parallel configuration on second opposed sides of each probe tip to supply a magnetic field in a second (Y) direction orthogonal to the first direction, and an optional third solenoid coil enclosing or inscribing the first and second pair to supply a magnetic field in a third direction (Z) orthogonal to both the first and second directions. The first pair, second pair, and third coil are each symmetrical with a point on the probe tip array, the point being aligned with and positioned close to a magnetic sensor during test.

摘要翻译： 提供探针卡和方法来测试晶片级的磁性传感器。 探针卡具有一个或多个探针尖端，其具有在每个探针尖端的第一相对侧上并联配置的第一对螺线管线圈，以在第一（X）方向上提供磁场，第二对螺线管线圈以 每个探针尖端的第二相对侧在与第一方向正交的第二（Y）方向上提供磁场，以及可选的第三电磁线圈，其包围或刻写第一和第二对以在第三方向（Z ）与第一和第二方向正交。 第一对，第二对和第三线圈各自与探针尖端阵列上的点对称，在测试期间该点与磁性传感器对准并靠近磁性传感器。

公开(公告)号：US09000760B2

公开(公告)日：2015-04-07

申请号：US13406149

申请日：2012-02-27

申请人： Lianjun Liu ,  Phillip Mather

发明人： Lianjun Liu ,  Phillip Mather

IPC分类号： G01R33/02 ,  G01R33/00 ,  G01R33/09

CPC分类号： G01R35/00 ,  G01R33/0011 ,  G01R33/093

摘要： A method and apparatus eliminate magnetic domain walls in a flux guide by applying, either simultaneously or sequentially, a current pulse along serially positioned reset lines to create a magnetic field along the flux guide, thereby removing the magnetic domain walls. By applying the current pulses in parallel and stepping through pairs of shorter reset lines segments via switches, less voltage is required.

摘要翻译： 一种方法和装置通过同时或顺序地施加沿着串行位置的复位线的电流脉冲来消除磁通引导件中的磁畴壁，以沿着磁通导向器产生磁场，从而去除磁畴壁。 通过并联施加电流脉冲并通过开关逐步穿过较短的复位线段，需要更少的电压。