公开(公告)号：US3736242A

公开(公告)日：1973-05-29

申请号：US3736242D

申请日：1970-12-04

Applicant: BELL TELEPHONE LABOR INC

Inventor： SCHWARTZ N ,  TOWNSHIP M ,  COUNTY M ,  VRATNY F

IPC: C23C14/35 ,  H01J37/34 ,  C23C15/00

CPC classification number: H01J37/34 ,  C23C14/35

Abstract: THE ELECTWRICAL AND PHYSICAL PORPERTIES OF CATHODICALLY SPUTTERED FILMS MAY BE CONTROLLED BY UTILIZING ALTERNATIVELY, ELECTRON NEGATIVE ION, AND POSITIVE ION BOMBARDMENT OF SUBSTRATE SURFACES DURING THE COURSE OF THE SPUTTERING PROCESS.