Patent search ap:("BELL TELEPHONE LABOR INC") AND inv:"POVILONIS EDWARD I" Page 1

1.

发明授权
Apparatus for plasma processing 失效
Title translation: 等离子体处理设备

公开(公告)号：US3476971A

公开(公告)日：1969-11-04

申请号：US3476971D

申请日：1967-12-18

Applicant: BELL TELEPHONE LABOR INC

Inventor： LIGENZA JOSEPH R , POVILONIS EDWARD I

IPC: C23C14/35 , H01J37/34 , H05H1/48 , H01J17/26 , H01J61/28

CPC classification number: H01J37/34 , C23C14/35 , H05H1/48

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