公开(公告)号：US3786323A

公开(公告)日：1974-01-15

申请号：US3786323D

申请日：1972-07-03

Applicant: BELL TELEPHONE LABOR INC

Inventor： PETERS F ,  SCHWARTZ N

IPC: C23C14/00 ,  H01B1/00 ,  H01C7/00 ,  H01C17/12 ,  H01G1/01

CPC classification number: H01C17/12 ,  C23C14/0057 ,  H01B1/00 ,  H01C7/006 ,  Y10T29/435

Abstract: A thin film material capable of functioning as the anode in electrochemically formed thin film capacitors and as the resistive track in anodized resistors in thin film integrated circuits comprising a film of sputtered tantalum and silicon.

Abstract translation: 一种能够在电化学形成的薄膜电容器中用作阳极的薄膜材料，以及薄膜集成电路中的阳极氧化电阻器中的电阻轨迹，其包括溅射的钽和硅的膜。