公开(公告)号：US12044804B2

公开(公告)日：2024-07-23

申请号：US17015030

申请日：2020-09-08

Applicant: BEIJING VOYAGER TECHNOLOGY CO., LTD.

Inventor： Qin Zhou ,  Yonghong Guo ,  Youmin Wang

IPC: G01S7/4863 ,  G01S17/18 ,  G01S17/46 ,  G01S17/931

CPC classification number: G01S7/4863 ,  G01S17/46 ,  G01S17/18 ,  G01S17/931

Abstract: Embodiments of the disclosure provide a range estimation system for the optical sensing system. The exemplary range estimation system includes an optical detector array configured to receive a laser pulse returned from an object. The optical detector array includes a plurality of detector elements each configured to measure an intensity of the returned laser pulse. The range estimation system further includes a processor. The processor is configured to calculate an intensity-related value based on the intensities of the returned laser pulse measured using the optical detector array. The processor is further configured to determine a traveling time of the laser pulse based on the calculated intensity-related value. The processor is also configured to estimate a range between the object and the optical sensing system based on the traveling time of the laser pulse.

公开(公告)号：US11909332B2

公开(公告)日：2024-02-20

申请号：US17395314

申请日：2021-08-05

Applicant: BEIJING VOYAGER TECHNOLOGY CO., LTD.

Inventor： Qin Zhou ,  Youmin Wang ,  Yue Lu ,  Lingkai Kong

IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00 ,  H02P25/00 ,  H02N1/08

CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0043 ,  B81B7/008 ,  H02P25/00 ,  B81B2201/033 ,  H02N1/08

Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

公开(公告)号：US11500196B2

公开(公告)日：2022-11-15

申请号：US16869513

申请日：2020-05-07

Applicant: Beijing Voyager Technology Co., Ltd.

Inventor： Anan Pan ,  Henghui Jiang ,  Qin Zhou ,  Lingkai Kong

IPC: G02B26/08 ,  G02B26/10 ,  G01S7/481

Abstract: Disclosed herein are techniques for improving structural stability and duration of light beam steering components in a LiDAR system. A galvo mirror assembly for light detection and ranging includes a top bracket including a first rotatable unit configured to rotate around an axis; a bottom bracket aligned with the top bracket and including a second rotatable unit configured to rotate around the axis; a mirror including a top end and a bottom end, where the top end of the mirror is coupled to the first rotatable unit of the top bracket and the bottom end of the mirror is coupled to the second rotatable unit of the bottom bracket, such that the mirror is rotatable around the axis; and an enhance plate extending between and non-rotatably coupled to the top bracket and the bottom bracket. The enhance plate is spaced apart from the mirror.

公开(公告)号：US20210397756A1

公开(公告)日：2021-12-23

申请号：US16907655

申请日：2020-06-22

Applicant: BEIJING VOYAGER TECHNOLOGY CO., LTD.

Inventor： Youmin Wang ,  Qin Zhou ,  Gary Li

IPC: G06F30/10 ,  G02B27/00 ,  G01S7/481

Abstract: Embodiments of the disclosure provide a design method for a LiDAR scanning mirror. The design method may include receiving, by a communication interface, design parameters of the LiDAR scanning mirror. The design method may further include setting, by at least one processor, an initial value and a step size for each design parameter. The design method may also include adjusting the design parameters according to the respective step sizes. The design method may additionally include computing one or more mirror performance indexes, by the at least one processor, by applying a Finite Element Analysis (FEA) model to the adjusted design parameters. The design method may further include determining that the mirror performance indexes meet a predetermined target performance. The design method may also include providing, by the at least one processor, the adjusted design parameters and the mirror performance indexes for making the LiDAR scanning mirror.

公开(公告)号：US20210396850A1

公开(公告)日：2021-12-23

申请号：US16905254

申请日：2020-06-18

Applicant: Beijing Voyager Technology Co., Ltd.

Inventor： Youmin Wang ,  Yufeng Wang ,  Qin Zhou ,  Gary Li

IPC: G01S7/481 ,  G01S17/931 ,  B81B3/00 ,  B81C1/00 ,  G02B1/11

Abstract: In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

公开(公告)号：US20210396849A1

公开(公告)日：2021-12-23

申请号：US16905248

申请日：2020-06-18

Applicant: Beijing Voyager Technology Co., Ltd.

Inventor： Youmin Wang ,  Yufeng Wang ,  Qin Zhou ,  Gary Li ,  Sergio Fabian Almeida Loya

IPC: G01S7/481 ,  G01S17/931 ,  B81B3/00 ,  G02B1/11

Abstract: In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

公开(公告)号：US20210367536A1

公开(公告)日：2021-11-25

申请号：US17395314

申请日：2021-08-05

Applicant: BEIJING VOYAGER TECHNOLOGY CO., LTD.

Inventor： Qin Zhou ,  Youmin Wang ,  Yue Lu ,  Lingkai Kong

IPC: H02N1/00 ,  B81B3/00 ,  H02P25/00 ,  B81B7/00

Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

公开(公告)号：US11092801B2

公开(公告)日：2021-08-17

申请号：US16664595

申请日：2019-10-25

Applicant: Beijing Voyager Technology Co., Ltd.

Inventor： Qin Zhou ,  Youmin Wang

IPC: G02B26/08 ,  G01S7/481 ,  G01S17/89 ,  G02B7/182 ,  G02B26/10 ,  G01S17/10 ,  G01S17/931

Abstract: A lever is used to rotate a microelectromechanical systems (MEMS) mirror. The lever can be used to provide more torque from a vertical comb drive. The MEMS mirror can be part of an array of micro mirrors used for beam steering a laser in a Light Detection and Ranging (LiDAR) system for an autonomous vehicle.

公开(公告)号：US11085995B2

公开(公告)日：2021-08-10

申请号：US16213995

申请日：2018-12-07

Applicant: Beijing Voyager Technology Co., Ltd.

Inventor： Qin Zhou ,  Youmin Wang

IPC: G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  G01S7/481 ,  G02B7/182 ,  G01S17/89 ,  G01S17/10 ,  G01S17/931

Abstract: An array of micro mirrors is used to beam steer a laser for Light Detection and Ranging (LiDAR) applications. The array of micro mirrors are driven in a nonlinear motion to synchronize motion of the micro mirrors in the array.

公开(公告)号：US11906726B2

公开(公告)日：2024-02-20

申请号：US17464401

申请日：2021-09-01

Applicant: BEIJING VOYAGER TECHNOLOGY CO., LTD.

Inventor： Qin Zhou ,  Youmin Wang

IPC: G02B26/08 ,  G01S7/481 ,  G02B26/10

CPC classification number: G02B26/0833 ,  G01S7/4817 ,  G02B26/101

Abstract: Embodiments of the disclosure provide micromachined mirror assemblies and hybrid driving methods thereof. In one example, a micromachined mirror assembly includes a base and an array of micro mirrors affixed on the base. The base is configured to tilt around a base tilting axis. Each micro mirror in the array of micro mirrors is configured to tilt around a respective mirror tilting axis. Each of the mirror tilting axes is parallel to one another and is nonparallel to the base tilting axis.