公开(公告)号：US11170967B2

公开(公告)日：2021-11-09

申请号：US16824069

申请日：2020-03-19

Applicant: Axcelis Technologies, Inc.

Inventor： Neil Bassom ,  Neil Colvin ,  Tseh-Jen Hsieh ,  Michael Ameen

IPC: H01J37/08 ,  H01J37/30 ,  H01J49/10 ,  H01J27/02

Abstract: An ion source is configured to form an ion beam and has an arc chamber enclosing an arc chamber environment. A reservoir apparatus can be configured as a repeller and provides a liquid metal to the arc chamber environment. A biasing power supply electrically biases the reservoir apparatus with respect to the arc chamber to vaporize the liquid metal to form a plasma in the arc chamber environment. The reservoir apparatus has a cup and cap defining a reservoir environment for the liquid metal that is fluidly coupled to the arc chamber environment by holes in the cap. Features extend from the cup into the reservoir and contact the liquid metal to feed the liquid metal toward the arc chamber environment by capillary action. A structure, surface area, roughness, and material modifies the capillary action. The feature can be an annular ring, rod, or tube extending into the liquid metal.

公开(公告)号：US20200303154A1

公开(公告)日：2020-09-24

申请号：US16824069

申请日：2020-03-19

Applicant: Axcelis Technologies, Inc.

Inventor： Neil Bassom ,  Neil Colvin ,  Tseh-Jen Hsieh ,  Michael Ameen

IPC: H01J37/08 ,  H01J37/30

Abstract: An ion source is configured to form an ion beam and has an arc chamber enclosing an arc chamber environment. A reservoir apparatus can be configured as a repeller and provides a liquid metal to the arc chamber environment. A biasing power supply electrically biases the reservoir apparatus with respect to the arc chamber to vaporize the liquid metal to form a plasma in the arc chamber environment. The reservoir apparatus has a cup and cap defining a reservoir environment for the liquid metal that is fluidly coupled to the arc chamber environment by holes in the cap. Features extend from the cup into the reservoir and contact the liquid metal to feed the liquid metal toward the arc chamber environment by capillary action. A structure, surface area, roughness, and material modifies the capillary action. The feature can be an annular ring, rod, or tube extending into the liquid metal.