公开(公告)号：US09930786B2

公开(公告)日：2018-03-27

申请号：US15515357

申请日：2015-10-15

Applicant: Atotech Deutschland GmbH

Inventor： Andreas Skupin ,  Stefan Grüβner

IPC: C23F1/00 ,  H05K3/00 ,  B81C1/00

CPC classification number: H05K3/0055 ,  B81C1/00539 ,  H05K3/00 ,  H05K3/0088 ,  H05K2203/0796 ,  H05K2203/1545

Abstract: A desmear module for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container connectable to a desmear unit, a pump and at least a first liquid connection element for connecting said pump with the desmear unit, wherein said pump is in conjunction with said desmear unit by said at least first liquid connection element; and wherein a treatment liquid level is provided inside the desmear module, which is above an intake area of the pump; wherein the desmear module further comprises at least a first liquid area, at least an adjacent second liquid area comprising the intake area of the pump, and at least a first separating element arranged between said at least first liquid area and said at least second liquid area.