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公开(公告)号：US20240280805A1
公开(公告)日：2024-08-22
申请号：US18112876
申请日：2023-02-22
发明人： Menachem LAPID , Nitzan CHAMIEL
CPC分类号： G02B27/0025 , G02B13/0095 , G02B21/02
摘要： The presently disclosed subject matter provides a method for aligning an objective and a pupil relay module of a microscope. The objective is configured to introduce an objective aberration component and the pupil relay module is configured to have a corresponding pupil relay module aberration component such that the pupil relay module aberration component compensates said objective aberration component when the pupil relay module is accurately aligned with the objective. The method comprises: (a) measuring a combined aberration indicator indicative of a combined aberration resulting from the optical combination of the objective and pupil relay module; (b) adjusting an optical alignment of the objective and pupil relay module based on the measured combined aberration indicator; (c) iterating (a) and (b) until the measured combined aberration indicator reaches a predetermined combined aberration indicator target thereby achieving accurate alignment.
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公开(公告)号：US20240255436A1
公开(公告)日：2024-08-01
申请号：US18104231
申请日：2023-01-31
发明人： Mariano ABRAMSON , Uzi BARAZANI , Menachem LAPID
CPC分类号： G01N21/8806 , G01N21/9501 , G02B21/02 , G02B21/125 , G02B21/18 , G02B27/0012 , G01N2201/0636 , G01N2201/121
摘要： A wafer inspection tool comprising an illumination system having: a field of view (FOV); a light source pupil having a size and shape; a central optical axis; and one or more field angle defining a shape of said FOV extending away from said light source pupil; an objective lens arrangement including an objective and a plurality of interchangeable telescopes coupled thereto, the objective lens arrangement being configured to collect light reflected off a plurality of field points on the wafer and to onwardly transmit a light beam formed from the collected light; and a light separator having a first reflective surface with a transmissive region formed therein and a second surface, wherein said transmissive region is arranged to allow therethrough a central portion of said light beam transmitted from said objective lens arrangement corresponding to the brightfield channel while said reflective surface is arranged to reflect a peripheral portion of said light beam transmitted from said objective lens arrangement corresponding to the darkfield channel; a relay module configured to relay said light source pupil to said transmissive region; wherein said transmissive region has a shape defined as a geometric intersection volume between a model of said illumination light and said reflective surface and said second surface; wherein said model includes a plurality of solids each solid having a cross section of said light source pupil and angled to a field angle of said one or more field angle.
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