公开(公告)号：US09711327B2

公开(公告)日：2017-07-18

申请号：US14801600

申请日：2015-07-16

Applicant: Applied Materials Israel Ltd.

Inventor： Dan Koronel ,  Amir Wilde

IPC: G01N23/00 ,  H01J37/26 ,  H01J37/22 ,  H01J37/244

CPC classification number: H01J37/265 ,  H01J37/222 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/28 ,  H01J2237/2817

Abstract: A method, computer product and system for optimization of configurable parameters of inspection tools are provided. The method includes applying a heuristic that utilizes a prioritized sequence of selections of configurable parameters. For each configuration setting of the heuristic the method includes providing a set of local scan images of a list of DOIs, calculating an optimization target function and updating the configuration settings with the best value of each scanned parameter according to said prioritization heuristic. The method includes outputting the one or more updated configuration settings to a recipe file.

公开(公告)号：US11636587B2

公开(公告)日：2023-04-25

申请号：US17138798

申请日：2020-12-30

Applicant: Applied Materials Israel Ltd.

Inventor： Dan Koronel ,  Liat Shalom Mermelstein

IPC: G06T7/00 ,  G01N21/95

Abstract: There is provided a system and method of inspecting a specimen. The method includes obtaining a first image of an inspection area of a die of a semiconductor specimen and a group of reference images corresponding to a group of candidate reference units, obtaining a second image informative of one or more partitions of the inspection area respectively associated with one or more inspection algorithms, for each given pixel of the first image, determining location of one or more reference pixels thereof based on information of the second image, selecting, from the group of candidate reference units, one or more specific reference units actually required for inspecting the inspection area based on the determined location, and using one or more reference images corresponding to the selected reference units to inspect the first image, thereby providing an inspection result of the inspection area.

公开(公告)号：US20170018403A1

公开(公告)日：2017-01-19

申请号：US14801600

申请日：2015-07-16

Applicant: Applied Materials Israel Ltd.

Inventor： Dan Koronel

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/22

CPC classification number: H01J37/265 ,  H01J37/222 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/28 ,  H01J2237/2817

Abstract: A method, computer product and system for optimization of configurable parameters of inspection tools are provided. The method includes applying a heuristic that utilizes a prioritized sequence of selections of configurable parameters. For each configuration setting of the heuristic the method includes providing a set of local scan images of a list of DOIs, calculating an optimization target function and updating the configuration settings with the best value of each scanned parameter according to said prioritization heuristic. The method includes outputting the one or more updated configuration settings to a recipe file.

Abstract translation: 提供了一种优化检测工具可配置参数的方法，计算机产品和系统。 该方法包括应用启发式算法，其利用可配置参数的优先选择序列。 对于启发式的每个配置设置，该方法包括提供DOI列表的一组本地扫描图像，根据所述优先级启发式算法，利用每个扫描参数的最佳值来更新配置设置。 该方法包括将一个或多个更新的配置设置输出到配方文件。