公开(公告)号：US12191113B2

公开(公告)日：2025-01-07

申请号：US17827204

申请日：2022-05-27

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  George M. Gammel ,  Eric Donald Wilson ,  Jay T. Scheuer ,  Xiangdong He ,  Shardul Patel ,  Robert C. Lindberg

IPC: H01J37/304 ,  H01J37/317

Abstract: Provided herein are approaches for optimizing a full horizontal scanned beam distance of an accelerator beam. In one approach, a method may include positioning a first Faraday cup along a first side of an intended beam-scan area, positioning a second Faraday cup along a second side of the intended beam-scan area, scanning an ion beam along the first and second sides of the intended beam-scan area, measuring a first beam current of the ion beam at the first Faraday cup and measuring a second beam current of the ion beam at the second Faraday cup, and determining an optimal scan distance of the ion beam across the intended beam-scan area based on the first beam current and the second beam current.

公开(公告)号：US20230386785A1

公开(公告)日：2023-11-30

申请号：US17827204

申请日：2022-05-27

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  George M. Gammel ,  Eric Donald Wilson ,  Jay T. Scheuer ,  Xiangdong He ,  Shardul Patel ,  Robert C. Lindberg

IPC: H01J37/304 ,  H01J37/317

CPC classification number: H01J37/3045 ,  H01J37/3171 ,  H01J2237/24405 ,  H01J2237/30483 ,  H01J2237/30477

Abstract: Provided herein are approaches for optimizing a full horizontal scanned beam distance of an accelerator beam. In one approach, a method may include positioning a first Faraday cup along a first side of an intended beam-scan area, positioning a second Faraday cup along a second side of the intended beam-scan area, scanning an ion beam along the first and second sides of the intended beam-scan area, measuring a first beam current of the ion beam at the first Faraday cup and measuring a second beam current of the ion beam at the second Faraday cup, and determining an optimal scan distance of the ion beam across the intended beam-scan area based on the first beam current and the second beam current.