公开(公告)号：US20180144966A1

公开(公告)日：2018-05-24

申请号：US15812922

申请日：2017-11-14

Applicant: Applied Materials, Inc.

Inventor： Kyung-Tae KIM ,  Su Ho CHO ,  Tsunehiko KITAMURA ,  Shinobu ABE ,  Shuran SHENG

IPC: H01L21/677

Abstract: In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.