Invention Application
- Patent Title: EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORMATION
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Application No.: US15812922Application Date: 2017-11-14
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Publication No.: US20180144966A1Publication Date: 2018-05-24
- Inventor: Kyung-Tae KIM , Su Ho CHO , Tsunehiko KITAMURA , Shinobu ABE , Shuran SHENG
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.
Public/Granted literature
- US10453728B2 Exchange and flip chamber design for heterojunction solar cell formation Public/Granted day:2019-10-22
Information query
IPC分类:
