公开(公告)号：US09022715B2

公开(公告)日：2015-05-05

申请号：US14029307

申请日：2013-09-17

Applicant: Applied Materials, Inc.

Inventor： Alexander S. Polyak ,  James L'Heureux ,  Christopher T. Lane ,  Susanne Schlaefer ,  Juergen Henrich ,  Josef Thomas Hoog ,  Calvin R. Augason

IPC: B65G53/46 ,  H01L21/677 ,  H01L21/67

CPC classification number: H01L21/677 ,  H01L21/67201

Abstract: Methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment is provided. In one embodiment, a load lock chamber is provided. The load lock chamber comprises a first circular housing, and a second circular housing disposed within and movable relative to the first circular housing, one of the first circular housing or the second circular housing comprising a plurality of discrete regions, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

Abstract translation: 提供了将一个或多个基板从第一压力环境转移到第二压力环境的方法和装置。 在一个实施例中，提供了一种加载锁定室。 负载锁定室包括第一圆形壳体和设置在第一圆形壳体内并可相对于第一圆形壳体移动的第二圆形壳体，第一圆形壳体或第二圆形壳体中的一个包括多个离散区域，其中至少一部分 基于第二圆形壳体相对于第一圆形壳体的角位置，多个离散区域与至少两个真空泵中的一个选择性流体连通。

公开(公告)号：US08869967B2

公开(公告)日：2014-10-28

申请号：US13748271

申请日：2013-01-23

Applicant: Applied Materials, Inc.

Inventor： Wolfgang Buschbeck ,  Juergen Henrich ,  Andreas Lopp ,  Susanne Schlaefer

IPC: B23B13/00 ,  H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67739 ,  H01L21/67201

Abstract: A dynamic load lock chamber that includes a plurality of actuators positioned along its length to achieve a desired pressure gradient from an atmospheric pressure side to a processing pressure side of the chamber is provided. The chamber includes a transport belt continuously running through the chamber to transport substrates from the atmospheric pressure side to the processing pressure side of the chamber, if situated on an inlet side of a production line, and from the processing pressure side to the atmospheric pressure side of the chamber, if positioned on an outlet side of the production line. Separation mechanisms may be attached to the belt to separate discrete regions within the chamber into a plurality of discrete volumes. Substrates may be disposed between the separation mechanisms, such that separation between adjacent pressure regions within the chamber is maintained as the substrates are transported through the chamber.

Abstract translation: 提供一种动态负载锁定室，其包括沿其长度定位的多个致动器，以实现从室的大气压侧到处理压力侧的期望的压力梯度。 所述腔室包括连续运行通过所述腔室的输送带，以将衬底从所述大气压侧输送到所述腔室的处理压力侧，如果位于生产线的入口侧，以及从处理压力侧到大气压侧 如果位于生产线的出口侧。 分离机构可以附接到带上以将腔室内的离散区域分离成多个离散体积。 衬底可以设置在分离机构之间，使得当衬底被输送通过腔室时，保持室内的相邻压力区域之间的间隔。