公开(公告)号：US20240420926A1

公开(公告)日：2024-12-19

申请号：US18815687

申请日：2024-08-26

Applicant: Applied Materials, Inc.

Inventor： Michael R. RICE ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Steven D. MARCUS ,  Kirubanandan Naina SHANMUGAM ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Madhukar KRISHNA ,  Shivaprakash Padadayya HIREMATH ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Sankar Menon CHERUBALA PATHAYAPURA

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/458 ,  C23C16/46

Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a method for coating a part via atomic layer deposition includes: fastening a workpiece to be coated to an interior volume facing portion of a part coating reactor; and performing an ALD process on the fastened workpiece within the part coating reactor.

公开(公告)号：US20240117491A1

公开(公告)日：2024-04-11

申请号：US17962378

申请日：2022-10-07

Applicant: Applied Materials, Inc.

Inventor： Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Yogesh TOMAR ,  Nikshep M. PATIL ,  Hari Venkatesh RAJENDRAN ,  Kirubanandan Naina SHANMUGAM ,  Gayatri NATU ,  Mahesh ARCOT ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Steven D. MARCUS ,  Michael R. RICE

IPC: C23C16/455 ,  C23C16/44

CPC classification number: C23C16/45544 ,  C23C16/4412 ,  C23C16/45557

Abstract: Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes: an oven having an enclosure that defines an interior volume configured to house the plurality of gas lines, the enclosure having a door configured for transferring the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the enclosure; a plurality of exhaust ports disposed through a second wall of the enclosure; a fluid panel disposed outside of the oven and coupled to the plurality of inlet ports via corresponding ones of a plurality of fluid distribution assemblies; and a foreline disposed outside of the oven and coupled to the plurality of exhaust ports.

公开(公告)号：US20230074149A1

公开(公告)日：2023-03-09

申请号：US17470294

申请日：2021-09-09

Applicant: Applied Materials, Inc.

Inventor： Michael R. RICE ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Steven D. MARCUS ,  Kirubanandan Naina SHANMUGAM ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Madhukar KRISHNA ,  Shivaprakash Padadayya HIREMATH ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Sankar Menon CHERUBALA PATHAYAPURA

IPC: C23C16/455

Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.