公开(公告)号：US20230073150A1

公开(公告)日：2023-03-09

申请号：US17470418

申请日：2021-09-09

Applicant: Applied Materials, Inc.

Inventor： Shivaprakash Padadayya HIREMATH ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Kirubanandan Naina SHANMUGAM ,  Madhukar KRISHNA ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Sriharish SRINIVASAN

IPC: H01L21/67

Abstract: Embodiments of heated lids for a process chamber are provided herein. In some embodiments, a heated lid includes: a body having a central region and a peripheral region, wherein the body includes a central opening in the central region, wherein the peripheral region includes a plurality of vertical slots that extend into an upper surface of the body and arranged along a circle to provide a thermal break, and wherein the body includes one or more annular plenums that extend into the upper surface of the body and a plurality of holes extending through a bottom surface of the one or more annular plenums to a lower surface of the body; a first heater ring having one or more heating elements disposed therein, wherein the first heater ring is coupled to the central region of the body; and a second heater ring having one or more heating elements disposed therein.

公开(公告)号：US20240420926A1

公开(公告)日：2024-12-19

申请号：US18815687

申请日：2024-08-26

Applicant: Applied Materials, Inc.

Inventor： Michael R. RICE ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Steven D. MARCUS ,  Kirubanandan Naina SHANMUGAM ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Madhukar KRISHNA ,  Shivaprakash Padadayya HIREMATH ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Sankar Menon CHERUBALA PATHAYAPURA

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/458 ,  C23C16/46

Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a method for coating a part via atomic layer deposition includes: fastening a workpiece to be coated to an interior volume facing portion of a part coating reactor; and performing an ALD process on the fastened workpiece within the part coating reactor.

公开(公告)号：US20230074149A1

公开(公告)日：2023-03-09

申请号：US17470294

申请日：2021-09-09

Applicant: Applied Materials, Inc.

Inventor： Michael R. RICE ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Steven D. MARCUS ,  Kirubanandan Naina SHANMUGAM ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Madhukar KRISHNA ,  Shivaprakash Padadayya HIREMATH ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Sankar Menon CHERUBALA PATHAYAPURA

IPC: C23C16/455

Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.