公开(公告)号：US20240162030A1

公开(公告)日：2024-05-16

申请号：US18412127

申请日：2024-01-12

Applicant: Applied Materials, Inc.

Inventor： Yao-Hung YANG ,  Shantanu Rajiv GADGIL ,  Kaushik RAO ,  Vincent Joseph KIRCHHOFF ,  Sagir KADIWALA ,  Munirah MAHYUDIN ,  Daniel CHOU

IPC: H01K1/20

CPC classification number: H01K1/20 ,  H01K7/00

Abstract: A lamp and epitaxial processing apparatus are described herein. In one example, the lamp includes a bulb, a filament, and a plurality of filament supports disposed in spaced-apart relation to the filament, each of the filament supports having a hook support and a hook. The hook includes a connector configured to fasten the hook to the hook support, a first vertical portion extending from the connector toward the filament, and a rounded portion extending from an end of the first vertical portion distal from the connector and configured to wrap around the filament. A second vertical portion extends from an end of the rounded portion distal from the first vertical portion and the second vertical portion has a length between 60% and 100% of the length of the first vertical portion.