公开(公告)号：US11557496B2

公开(公告)日：2023-01-17

申请号：US16826970

申请日：2020-03-23

Applicant: Applied Materials, Inc.

Inventor： Michael Blanchard ,  Steven M. Anella ,  Brant S. Binns ,  Jordan B. Tye ,  D. Jeffrey Lischer

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673

Abstract: A cassette with embedded temperature sensors that is disposed within a load lock is disclosed. The temperature sensors may be disposed in a plurality of shelves of the load lock cassette to monitor the temperature of each of a plurality of workpieces disposed in the load lock. The output of these temperature sensors may be provided to a controller, which controls when the load lock is opened. The load lock cassette may also include cooling channels to accelerate the cooling of the workpieces to improve throughput. The cooling may be controlled using closed loop control, where a controller monitors the temperature of the workpieces during the cooling operation.

公开(公告)号：US20210296146A1

公开(公告)日：2021-09-23

申请号：US16826970

申请日：2020-03-23

Applicant: Applied Materials, Inc.

Inventor： Michael Blanchard ,  Steven M. Anella ,  Brant S. Binns ,  Jordan B. Tye ,  D. Jeffrey Lischer

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673

Abstract: A cassette with embedded temperature sensors that is disposed within a load lock is disclosed. The temperature sensors may be disposed in a plurality of shelves of the load lock cassette to monitor the temperature of each of a plurality of workpieces disposed in the load lock. The output of these temperature sensors may be provided to a controller, which controls when the load lock is opened. The load lock cassette may also include cooling channels to accelerate the cooling of the workpieces to improve throughput. The cooling may be controlled using closed loop control, where a controller monitors the temperature of the workpieces during the cooling operation.