公开(公告)号：US20180236632A1

公开(公告)日：2018-08-23

申请号：US15957801

申请日：2018-04-19

Applicant: Applied Materials, Inc.

Inventor： Laxman Murugesh ,  Kadthala Ramaya Narendrnath

IPC: B24B37/20 ,  B29C67/20 ,  B29C71/04 ,  B24B37/24 ,  B29K75/00 ,  B29C35/08 ,  B29C64/112 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y70/00 ,  B29K105/04 ,  B29K105/00 ,  B33Y10/00

CPC classification number: B24B37/205 ,  B24B37/24 ,  B29C64/112 ,  B29C67/20 ,  B29C71/04 ,  B29C2035/0822 ,  B29C2035/0827 ,  B29K2075/00 ,  B29K2105/0032 ,  B29K2105/04 ,  B29K2995/0026 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y70/00

Abstract: A method of fabricating a polishing pad includes determining a desired distribution of voids to be introduced within a polymer matrix of a polishing layer of the polishing pad. Electronic control signals configured to be read by a 3D printer are generated which specify the locations where a polymer matrix precursor is to be deposited, and specify the locations of the desired distribution of voids where no material is to be deposited. A plurality of layers of the polymer matrix corresponding to the plurality of the first locations is successfully deposited with the 3D printer. Each layer of the plurality of layers of polymer matrix is deposited by ejecting a polymer matrix precursor from a nozzle. The polymer matrix precursor is solidified to form a solidified polymer matrix having the desired distribution of voids.

公开(公告)号：US09481608B2

公开(公告)日：2016-11-01

申请号：US14088216

申请日：2013-11-22

Applicant: Applied Materials, Inc.

Inventor： Ashish Bhatnagar ,  Laxman Murugesh ,  Padma Gopalakrishnan

IPC: C04B41/00 ,  B23K26/00 ,  H01L21/67 ,  H01L21/683 ,  C03B25/02

CPC classification number: C04B41/0036 ,  B23K26/352 ,  C03B25/02 ,  H01L21/67115 ,  H01L21/6831 ,  Y10T428/131

Abstract: A method of fabricating a processing chamber component comprises forming a processing chamber component having a structural body with surface regions having microcracks, and directing a laser beam onto the microcracks of the surface regions of the structural body for a sufficient time to heal and close off the microcracks by themselves.

Abstract translation: 一种制造处理室部件的方法包括形成具有结构体的处理室部件，该结构体具有具有微裂纹的表面区域，并且将激光束引导到结构体的表面区域的微裂纹上足够的时间来愈合和闭合 微裂纹自己

公开(公告)号：US09993907B2

公开(公告)日：2018-06-12

申请号：US14549443

申请日：2014-11-20

Applicant: Applied Materials, Inc.

Inventor： Laxman Murugesh ,  Kadthala Ramaya Narendrnath

IPC: B24B37/20 ,  B29C71/04 ,  B29C67/20 ,  B24B37/24 ,  B29K75/00 ,  B29K105/04 ,  B29K105/00 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y70/00 ,  B33Y50/02 ,  B29C35/08 ,  B29C64/112

CPC classification number: B24B37/205 ,  B24B37/24 ,  B29C64/112 ,  B29C67/20 ,  B29C71/04 ,  B29C2035/0822 ,  B29C2035/0827 ,  B29K2075/00 ,  B29K2105/0032 ,  B29K2105/04 ,  B29K2995/0026 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y70/00

Abstract: A method of fabricating a polishing pad includes determining a desired distribution of voids to be introduced within a polymer matrix of a polishing layer of the polishing pad. Electronic control signals configured to be read by a 3D printer are generated which specify the locations where a polymer matrix precursor is to be deposited, and specify the locations of the desired distribution of voids where no material is to be deposited. A plurality of layers of the polymer matrix corresponding to the plurality of the first locations is successfully deposited with the 3D printer. Each layer of the plurality of layers of polymer matrix is deposited by ejecting a polymer matrix precursor from a nozzle. The polymer matrix precursor is solidified to form a solidified polymer matrix having the desired distribution of voids.

公开(公告)号：US20150174826A1

公开(公告)日：2015-06-25

申请号：US14549443

申请日：2014-11-20

Applicant: Applied Materials, Inc.

Inventor： Laxman Murugesh ,  Kadthala Ramaya Narendrnath

IPC: B29C67/00 ,  B24B37/20 ,  B24B37/24 ,  B29C71/04 ,  B29C67/20

CPC classification number: B24B37/205 ,  B24B37/24 ,  B29C64/112 ,  B29C67/20 ,  B29C71/04 ,  B29C2035/0822 ,  B29C2035/0827 ,  B29K2075/00 ,  B29K2105/0032 ,  B29K2105/04 ,  B29K2995/0026 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y70/00

Abstract: A method of fabricating a polishing pad includes determining a desired distribution of voids to be introduced within a polymer matrix of a polishing layer of the polishing pad. Electronic control signals configured to be read by a 3D printer are generated which specify the locations where a polymer matrix precursor is to be deposited, and specify the locations of the desired distribution of voids where no material is to be deposited. A plurality of layers of the polymer matrix corresponding to the plurality of the first locations is successfully deposited with the 3D printer. Each layer of the plurality of layers of polymer matrix is deposited by ejecting a polymer matrix precursor from a nozzle. The polymer matrix precursor is solidified to form a solidified polymer matrix having the desired distribution of voids.

Abstract translation: 制造抛光垫的方法包括确定要引入抛光垫的抛光层的聚合物基质内的空隙的期望分布。 产生配置为由3D打印机读取的电子控制信号，其指定要沉积聚合物基质前体的位置，并且指定在没有材料沉积的情况下所需的空隙分布的位置。 对应于多个第一位置的多个聚合物基体层被成功地沉积在3D打印机中。 通过从喷嘴喷射聚合物基质前体而沉积多层聚合物基质的每一层。 聚合物基质前体被固化以形成具有所需空隙分布的固化聚合物基质。

公开(公告)号：US20210245322A1

公开(公告)日：2021-08-12

申请号：US17240934

申请日：2021-04-26

Applicant: Applied Materials, Inc.

Inventor： Laxman Murugesh ,  Kadthala Ramaya Narendrnath

IPC: B24B37/20 ,  B29C71/04 ,  B29C67/20 ,  B24B37/24

Abstract: A method of fabricating a polishing pad includes determining a desired distribution of voids to be introduced within a polymer matrix of a polishing layer of the polishing pad. Electronic control signals configured to be read by a 3D printer are generated which specify the locations where a polymer matrix precursor is to be deposited, and specify the locations of the desired distribution of voids where no material is to be deposited. A plurality of layers of the polymer matrix corresponding to the plurality of the first locations is successfully deposited with the 3D printer. Each layer of the plurality of layers of polymer matrix is deposited by ejecting a polymer matrix precursor from a nozzle. The polymer matrix precursor is solidified to form a solidified polymer matrix having the desired distribution of voids.

公开(公告)号：US11007618B2

公开(公告)日：2021-05-18

申请号：US15957801

申请日：2018-04-19

Applicant: Applied Materials, Inc.

Inventor： Laxman Murugesh ,  Kadthala Ramaya Narendmath

IPC: B24B37/20 ,  B29C71/04 ,  B29C67/20 ,  B24B37/24 ,  B29K75/00 ,  B29K105/04 ,  B29K105/00 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y70/00 ,  B33Y50/02 ,  B29C35/08 ,  B29C64/112

Abstract: A method of fabricating a polishing pad includes determining a desired distribution of voids to be introduced within a polymer matrix of a polishing layer of the polishing pad. Electronic control signals configured to be read by a 3D printer are generated which specify the locations where a polymer matrix precursor is to be deposited, and specify the locations of the desired distribution of voids where no material is to be deposited. A plurality of layers of the polymer matrix corresponding to the plurality of the first locations is successfully deposited with the 3D printer. Each layer of the plurality of layers of polymer matrix is deposited by ejecting a polymer matrix precursor from a nozzle. The polymer matrix precursor is solidified to form a solidified polymer matrix having the desired distribution of voids.