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    Method to measure light loss of optical films and optical substrates
    1.
    发明授权
    Method to measure light loss of optical films and optical substrates 有权

    公开(公告)号：US12140494B2

    公开(公告)日：2024-11-12

    申请号：US18397977

    申请日：2023-12-27

    Applicant: Applied Materials, Inc.

    Inventor： Jinxin Fu ,  Kang Luo ,  Fariah Hayee ,  Ludovic Godet

    IPC: G01M11/02

    Abstract: A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.

    Fabrication of diffractive optic element having a variable refractive index profile by inkjet printing deposition
    2.
    发明授权
    Fabrication of diffractive optic element having a variable refractive index profile by inkjet printing deposition 有权

    公开(公告)号：US11867931B2

    公开(公告)日：2024-01-09

    申请号：US17448619

    申请日：2021-09-23

    Applicant: Applied Materials, Inc.

    Inventor： Kang Luo ,  Xiaopei Deng ,  Daihua Zhang ,  Ludovic Godet

    IPC: G02B5/18 ,  G03F7/00 ,  G03F7/16

    CPC classification number: G02B5/1857 ,  G03F7/0005 ,  G03F7/16

    Abstract: Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to optical devices and methods of manufacturing optical devices having optical device structures with at least one of varying depths or refractive indices across the surface of a substrate. According to certain embodiments, an inkjet process is used to deposit a volumetrically variable optical device that is etched to form a diffractive optic element (DOE). Volumetrically variable can relate to the thickness of the optical device, or the relative volume of two or more diffractive materials deposited in combination. According to other embodiments, a single-profile DOE is deposited on a substrate and an inkjet process deposits a volumetrically variable organic material over the DOE. The DOE and organic material are etched to modify the profile of the structure, after which the organic material is removed, leaving the modified-profile DOE.

    Methods of greytone imprint lithography to fabricate optical devices
    3.
    发明授权
    Methods of greytone imprint lithography to fabricate optical devices 有权

    公开(公告)号：US12111572B2

    公开(公告)日：2024-10-08

    申请号：US18333290

    申请日：2023-06-12

    Applicant: Applied Materials, Inc.

    Inventor： Hao Tang ,  Kang Luo ,  Erica Chen ,  Yongan Xu

    IPC: G03F7/00 ,  G02B5/18

    CPC classification number: G03F7/0005 ,  G02B5/1857 ,  G03F7/0002

    Abstract: A method of imprinting a pattern on a substrate is provided. The method includes forming a first pattern on a plurality of masters using a method other than imprinting, the first pattern including a plurality of patterned features of varying sizes; measuring the patterned features at a plurality of locations on each of the masters; selecting a first master of the plurality of masters based on the measurements of the patterned features on each of the masters; using the first master to form a second pattern on an imprint template; and imprinting the first pattern on a first device with the imprint template.

    Method to measure light loss of optical films and optical substrates
    6.
    发明授权
    Method to measure light loss of optical films and optical substrates 有权

    公开(公告)号：US11892367B2

    公开(公告)日：2024-02-06

    申请号：US17692573

    申请日：2022-03-11

    Applicant: Applied Materials, Inc.

    Inventor： Jinxin Fu ,  Kang Luo ,  Fariah Hayee ,  Ludovic Godet

    IPC: G01M11/02

    CPC classification number: G01M11/0285 ,  G01M11/0207

    Abstract: A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.

    FABRICATION OF DIFFRACTIVE OPTIC ELEMENT HAVING A VARIABLE REFRACTIVE INDEX PROFILE BY INKJET PRINTING DEPOSITION
    8.
    发明申请
    FABRICATION OF DIFFRACTIVE OPTIC ELEMENT HAVING A VARIABLE REFRACTIVE INDEX PROFILE BY INKJET PRINTING DEPOSITION 有权

    公开(公告)号：US20220091314A1

    公开(公告)日：2022-03-24

    申请号：US17448619

    申请日：2021-09-23

    Applicant: Applied Materials, Inc.

    Inventor： Kang Luo ,  Xiaopei Deng ,  Daihua Zhang ,  Ludovic Godet

    IPC: G02B5/18 ,  G03F7/00 ,  G03F7/16

    Abstract: Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to optical devices and methods of manufacturing optical devices having optical device structures with at least one of varying depths or refractive indices across the surface of a substrate. According to certain embodiments, an inkjet process is used to deposit a volumetrically variable optical device that is etched to form a diffractive optic element (DOE). Volumetrically variable can relate to the thickness of the optical device, or the relative volume of two or more diffractive materials deposited in combination. According to other embodiments, a single-profile DOE is deposited on a substrate and an inkjet process deposits a volumetrically variable organic material over the DOE. The DOE and organic material are etched to modify the profile of the structure, after which the organic material is removed, leaving the modified-profile DOE.

    Fluid management system for inkjet machines
    9.
    发明授权
    Fluid management system for inkjet machines 有权

    公开(公告)号：US11884076B2

    公开(公告)日：2024-01-30

    申请号：US17647791

    申请日：2022-01-12

    Applicant: Applied Materials, Inc.

    Inventor： Daihua Zhang ,  Kazuya Daito ,  Kang Luo ,  Elsa Massonneau ,  Alexey Stepanov ,  Ludovic Godet

    IPC: B41J2/165 ,  B41J2/18

    CPC classification number: B41J2/16552 ,  B41J2/18 ,  B41J2002/16594

    Abstract: Embodiments described herein provide for a fluid management system and a method of utilizing the fluid management system. The fluid management system includes a servicing fluid management system and an ink management system. The servicing fluid management system and the ink management system run in parallel within an inkjet chamber. The ink management system supports the flow of inkjet materials between a waste tank, one or more inkjet material supply tanks, an ink management module, and the inkjet printer. The servicing fluid management system supports the flow of servicing fluids between the waste tank, one or more servicing fluid supply tanks, a servicing fluid management module, and the inkjet printer.

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