公开(公告)号：US20240395514A1

公开(公告)日：2024-11-28

申请号：US18202335

申请日：2023-05-26

Applicant: Applied Materials, Inc.

Inventor： Prashant AGARWAL ,  Junqi WEI ,  Ananthkrishna JUPUDI ,  Clinton GOH ,  Tuck Foong KOH ,  Kai Liang LIEW

IPC: H01J37/32 ,  C23C14/02 ,  C23C14/34 ,  C23C14/54 ,  C23C14/56 ,  C23C14/58 ,  H01L21/324 ,  H01L21/67 ,  H05B6/80

Abstract: Embodiments of multi-chamber processing tools are provided herein. In some embodiments, a multi-chamber processing tool includes: a factory interface configured to receive a substrate; a pre-heat chamber directly coupled to the factory interface; a load lock chamber coupled to the factory interface and having a first slit valve disposed therebetween, wherein the load lock chamber is coupled to a pump configured to create a vacuum environment when the first slit valve is in a closed position; a degas chamber coupled to the factory interface and having a second slit valve, wherein the degas chamber is coupled to a second pump configured to create a vacuum environment when the second slit valve is in a closed position, and wherein the degas chamber includes a heat source; one or more process chambers; and a transfer chamber coupled to the load lock chamber, the degas chamber, and the one or more process chambers.