公开(公告)号：US20180124960A1

公开(公告)日：2018-05-03

申请号：US15336279

申请日：2016-10-27

Applicant: Applied Materials, Inc.

Inventor： Joseph Vincent ,  Michael Kuchar ,  Dean C. Hruzek ,  Vijayabaskar Soundarrajan ,  Pandu Maddherla ,  Adam J. Wyatt ,  Robert M. McAndrew

IPC: H05K13/02 ,  H05K7/20 ,  H05K7/14

CPC classification number: H05K13/021 ,  H01L21/67126 ,  H01L21/67201 ,  H05K7/1401 ,  H05K7/20209

Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.

公开(公告)号：US10159169B2

公开(公告)日：2018-12-18

申请号：US15336279

申请日：2016-10-27

Applicant: Applied Materials, Inc.

Inventor： Joseph Vincent ,  Michael Kuchar ,  Dean C. Hruzek ,  Vijayabaskar Soundarrajan ,  Pandu Maddherla ,  Adam J. Wyatt ,  Robert M. McAndrew

IPC: H05K13/02 ,  H01L21/67 ,  H05K7/14 ,  H05K7/20

Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.

公开(公告)号：US20180185893A1

公开(公告)日：2018-07-05

申请号：US15396637

申请日：2016-12-31

Applicant: Applied Materials, Inc.

Inventor： Joseph Vincent

IPC: B08B9/08 ,  H01L21/67 ,  B08B5/00 ,  B05B1/34

CPC classification number: B08B9/00 ,  B05B1/3402 ,  H01L21/67017 ,  H01L21/67196

Abstract: Transfer chamber gas purge systems, apparatus, and methods are disclosed. Embodiments include a transfer chamber including a plurality of distributed purge gas inlets, each inlet including a diffusing member, each diffusing member including a diffusing element and a diffusing housing integrally formed as a single piece. The diffusing element and the diffuser housing together form a diffusing chamber configured to cause a purge gas exiting the porous diffusing element to have a laminar flow. Numerous other aspects are disclosed.