公开(公告)号：US12249525B1

公开(公告)日：2025-03-11

申请号：US18680896

申请日：2024-05-31

Applicant: Applied Materials, Inc.

Inventor： Ian McDonald ,  Prashant Aji ,  Chengqing Wang ,  Shifang Li ,  Xinyuan Chong

IPC: H01L21/67 ,  H01L21/66

Abstract: Systems, methods, and computer-readable mediums for monitoring temperature of a substrate are described. Spectroscopic measurements are performed on a surface of the substrate using a metrology tool integrated with a processing tool. The measurements may be used to determine that the substrate has cooled below a threshold temperature using the spectroscopic measurements.