公开(公告)号：US20230266247A1

公开(公告)日：2023-08-24

申请号：US18129503

申请日：2023-03-31

Applicant: Applied Materials, Inc.

Inventor： Avishek GHOSH ,  Byung-Sung KWAK ,  Todd EGAN ,  Robert Jan VISSER ,  Gangadhar BANAPPANAVAR ,  Dinesh KABRA

IPC: G01N21/64 ,  H10K50/10

CPC classification number: G01N21/6489 ,  G01N21/6408 ,  H10K50/182

Abstract: An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

公开(公告)号：US20210208077A1

公开(公告)日：2021-07-08

申请号：US17188485

申请日：2021-03-01

Applicant: Applied Materials, Inc.

Inventor： Avishek GHOSH ,  Byung-Sung KWAK ,  Todd EGAN ,  Robert Jan VISSER ,  Gangadhar BANAPPANAVAR ,  Dinesh KABRA

IPC: G01N21/64 ,  H01L51/52

Abstract: An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.