公开(公告)号：US20170017165A1

公开(公告)日：2017-01-19

申请号：US15207991

申请日：2016-07-12

Applicant: Applied Materials, Inc.

Inventor： Christopher Dennis BENCHER ,  Joseph R. JOHNSON ,  Dave MARKLE ,  Mehdi VAEZ-IRAVANI

IPC: G03F7/20 ,  G02B27/28 ,  G02B5/30 ,  G02B26/08

CPC classification number: G02B27/283 ,  G02B5/3083 ,  G02B26/0833 ,  G02F1/1303 ,  G03F7/2008 ,  G03F7/2057 ,  G03F7/70291 ,  G03F7/70566

Abstract: The present disclosure provides a method for producing an image on a substrate. The method includes providing a single beam of light to a multiple DMD assembly, splitting the single beam of light into an s-polarization beam and a p-polarization beam, and reflecting the s-polarization beam and the p-polarization beam through the multiple DMD assembly such that the multiple DMD assembly produces a plurality of superimposed images on the substrate.

Abstract translation: 本公开提供了一种用于在基板上产生图像的方法。 该方法包括向多个DMD组件提供单个光束，将单个光束分解为s偏振光束和p偏振光束，并将S偏振光束和p偏振光束反射通过多个 DMD组件，使得多个DMD组件在衬底上产生多个叠加的图像。