公开(公告)号：US20240128052A1

公开(公告)日：2024-04-18

申请号：US17964621

申请日：2022-10-12

Applicant: Applied Materials, Inc.

Inventor： Costel Biloiu ,  Adam Calkins ,  Benjamin Alexandrovich ,  Solomon Belangedi Basame ,  Kevin M. Daniels

IPC: H01J37/32 ,  H05H1/46

CPC classification number: H01J37/3211 ,  H05H1/4652

Abstract: An antenna assembly, comprising: an antenna; a dielectric enclosure surrounding the antenna; and a Faraday shield, disposed around the antenna, and arranged between the antenna and the dielectric enclosure, wherein the Faraday shield comprises a non-uniform opacity along an antenna axis of the antenna, wherein a first opacity of the Faraday shield at a first position along the antenna axis is greater than a second opacity of the Faraday shield at a second position along the antenna axis of the antenna.