ENHANCED MEMS SENSOR EMBEDDED HEATER

    公开(公告)号:US20230061188A1

    公开(公告)日:2023-03-02

    申请号:US17461866

    申请日:2021-08-30

    Applicant: Apple Inc.

    Abstract: Aspects of the subject technology relate to an apparatus including a housing and a substrate. The apparatus further includes a sensor, an integrated circuit mounted on the substrate, and one or more heating elements configured to adjust a temperature of the sensor to facilitate measurement of temperature sensitivity and calibration of the sensor.

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