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公开(公告)号：US20180220216A1
公开(公告)日：2018-08-02
申请号：US15726306
申请日：2017-10-05
Applicant: Apple Inc.
Inventor： Janhavi S. Agashe , Anthony D. Minervini , Ruchir M. Dave , Jae H. Lee
CPC classification number: H04R1/08 , B81B3/0083 , B81B3/0089 , B81B2201/0257 , G02B5/208 , G02B5/26 , H04R19/005 , H04R19/04
Abstract: A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.
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公开(公告)号：US20160007108A1
公开(公告)日：2016-01-07
申请号：US14325204
申请日：2014-07-07
Applicant: Apple Inc.
Inventor： Jae H. Lee , Janhavi S. Agashe
CPC classification number: H04R1/08 , H04R7/18 , H04R23/008 , H04R2201/003 , H04R2307/207
Abstract: A micro-electro-mechanical system (MEMS) optical sensor including an enclosure having a top wall, a bottom wall and a sidewall connecting the top wall and the bottom wall. The sensor further including a compliant membrane positioned within the enclosure, which is configured to vibrate in response to an acoustic wave and having a grating formed therein. A reflector is formed directly on an inner surface of one of the bottom wall or the top wall of the enclosure. A light emitter is positioned within the enclosure along a side of the compliant membrane opposite the reflector, the light emitter is configured to transmit a laser light toward the grating and the reflector. A light detector is positioned along the side of the compliant membrane opposite the reflector, the light detector configured to detect an interference pattern of the laser light, which is indicative of an acoustic vibration of the compliant membrane.
Abstract translation: 微机电系统（MEMS）光学传感器包括具有顶壁，底壁和连接顶壁和底壁的侧壁的外壳。 所述传感器还包括位于所述外壳内的柔性膜，所述柔性膜被构造成响应于声波而振动并且具有形成在其中的光栅。 反射器直接形成在外壳的底壁或顶壁之一的内表面上。 光发射器沿着柔性膜的与反射器相对的一侧定位在外壳内，光发射器被配置为向激光束和反射器传输激光。 光检测器沿着与反射器相对的柔性膜的侧面定位，光检测器被配置为检测表示柔顺膜的声振动的激光的干涉图案。
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公开(公告)号：US09609439B2
公开(公告)日：2017-03-28
申请号：US15202368
申请日：2016-07-05
Applicant: Apple Inc.
Inventor： Janhavi S. Agashe , Jae H. Lee
CPC classification number: H04R23/008 , B81C1/00158 , B81C1/00341 , B81C2201/0174 , B81C2203/0785 , G01N21/01 , G01N21/4788 , G01N21/55 , G01N2201/0612 , H04R1/04 , H04R2201/003 , Y10T29/413
Abstract: A micro-electro-mechanical system (MEMS) optical sensor, method of detecting sound using the MEMS optical sensor and method of manufacturing. The MEMS optical sensor including a substrate having a base portion and a vertically extending support portion. The sensor further including a top plate having a compliant membrane configured to vibrate in response to acoustic waves, the top plate connected to the support portion and having a reflective surface. The sensor also includes a back plate connected to the support portion, the back plate having a grating portion positioned below the reflective surface portion and a base plate connected to the support portion at a position below the back plate. A light emitter, a light detector and circuitry operable to tilt the top plate and the back plate with respect to the base plate so as to direct the reflected laser light toward the light detector are further provided.
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公开(公告)号：US09510110B2
公开(公告)日：2016-11-29
申请号：US14611948
申请日：2015-02-02
Applicant: Apple Inc.
Inventor： Jae H. Lee , Janhavi S. Agashe
CPC classification number: H04R23/008 , H04R7/18 , H04R31/003 , H04R2201/003 , H04R2231/003 , H04R2307/207
Abstract: A micro-electro-mechanical system (MEMS) optical sensor and method of manufacturing a MEMS optical sensor. The MEMS optical sensor may be a MEMS optical microphone including a compliant membrane configured to vibrate in response to an acoustic wave, the compliant membrane having a grating suspended therein. The optical sensor further including a back plate positioned above the compliant membrane, the back plate having a reflector suspended within a center portion of the back plate and aligned with the grating. The optical sensor further including a light emitter positioned below the compliant membrane and configured to transmit a laser light toward the grating and the reflector. The optical sensor also including a light detector configured to detect an interference pattern of the laser light after reflection from the reflector, wherein the interference pattern is indicative of an acoustic vibration of the compliant membrane. Other embodiments are also described and claimed.
Abstract translation: 微电子机械系统（MEMS）光学传感器和MEMS光学传感器的制造方法。 MEMS光学传感器可以是包括配置成响应于声波振动的柔性膜的MEMS光学传声器，柔性膜具有悬挂在其中的光栅。 光学传感器还包括位于顺应膜上方的背板，背板具有悬挂在背板的中心部分中并与光栅对准的反射器。 光学传感器还包括位于柔性膜下方并被配置为朝向光栅和反射器传输激光的光发射器。 光学传感器还包括配置成检测来自反射器的反射后的激光的干涉图案的光检测器，其中干涉图案表示柔顺膜的声振动。 还描述和要求保护其他实施例。
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公开(公告)号：US20150323456A1
公开(公告)日：2015-11-12
申请号：US14330723
申请日：2014-07-14
Applicant: Apple Inc.
Inventor： Janhavi S. Agashe , Jae H. Lee
CPC classification number: H04R23/008 , B81C1/00158 , B81C1/00341 , B81C2201/0174 , B81C2203/0785 , G01N21/01 , G01N21/4788 , G01N21/55 , G01N2201/0612 , H04R1/04 , H04R2201/003 , Y10T29/413
Abstract: A micro-electro-mechanical system (MEMS) optical sensor, method of detecting sound using the MEMS optical sensor and method of manufacturing. The MEMS optical sensor including a substrate having a base portion and a vertically extending support portion. The sensor further including a top plate having a compliant membrane configured to vibrate in response to acoustic waves, the top plate connected to the support portion and having a reflective surface. The sensor also includes a back plate connected to the support portion, the back plate having a grating portion positioned below the reflective surface portion and a base plate connected to the support portion at a position below the back plate. A light emitter, a light detector and circuitry operable to tilt the top plate and the back plate with respect to the base plate so as to direct the reflected laser light toward the light detector are further provided.
Abstract translation: 微机电系统（MEMS）光学传感器，使用MEMS光学传感器检测声音的方法和制造方法。 MEMS光学传感器包括具有基部和垂直延伸的支撑部的基板。 所述传感器还包括顶板，所述顶板具有构造为响应于声波而振动的柔性膜，所述顶板连接到所述支撑部分并且具有反射表面。 传感器还包括连接到支撑部分的背板，背板具有位于反射表面部分下方的光栅部分和在背板下方的位置处连接到支撑部分的基板。 还提供了一种发光器，光检测器和可操作以相对于基板倾斜顶板和背板以便将反射的激光引向光检测器的电路。
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Patent Agency Ranking
公开(公告)号：US10167188B2
公开(公告)日：2019-01-01
申请号：US15419663
申请日：2017-01-30
Applicant: Apple Inc.
Inventor： Janhavi S. Agashe , Anthony D. Minervini , Ruchir M. Dave , Jae H. Lee
Abstract: A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.
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公开(公告)号：US09510074B2
公开(公告)日：2016-11-29
申请号：US14325204
申请日：2014-07-07
Applicant: Apple Inc.
Inventor： Jae H. Lee , Janhavi S. Agashe
CPC classification number: H04R1/08 , H04R7/18 , H04R23/008 , H04R2201/003 , H04R2307/207
Abstract: A micro-electro-mechanical system (MEMS) optical sensor including an enclosure having a top wall, a bottom wall and a sidewall connecting the top wall and the bottom wall. The sensor further including a compliant membrane positioned within the enclosure, which is configured to vibrate in response to an acoustic wave and having a grating formed therein. A reflector is formed directly on an inner surface of one of the bottom wall or the top wall of the enclosure. A light emitter is positioned within the enclosure along a side of the compliant membrane opposite the reflector, the light emitter is configured to transmit a laser light toward the grating and the reflector. A light detector is positioned along the side of the compliant membrane opposite the reflector, the light detector configured to detect an interference pattern of the laser light, which is indicative of an acoustic vibration of the compliant membrane.
Abstract translation: 微机电系统（MEMS）光学传感器包括具有顶壁，底壁和连接顶壁和底壁的侧壁的外壳。 所述传感器还包括位于所述外壳内的柔性膜，所述柔性膜被构造成响应于声波而振动并且具有形成在其中的光栅。 反射器直接形成在外壳的底壁或顶壁之一的内表面上。 光发射器沿着柔性膜的与反射器相对的一侧定位在外壳内，光发射器被配置为向激光束和反射器传输激光。 光检测器沿着与反射器相对的柔性膜的侧面定位，光检测器被配置为检测表示柔顺膜的声振动的激光的干涉图案。
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公开(公告)号：US09404860B2
公开(公告)日：2016-08-02
申请号：US14330723
申请日：2014-07-14
Applicant: Apple Inc.
Inventor： Janhavi S. Agashe , Jae H. Lee
CPC classification number: H04R23/008 , B81C1/00158 , B81C1/00341 , B81C2201/0174 , B81C2203/0785 , G01N21/01 , G01N21/4788 , G01N21/55 , G01N2201/0612 , H04R1/04 , H04R2201/003 , Y10T29/413
Abstract: A micro-electro-mechanical system (MEMS) optical sensor, method of detecting sound using the MEMS optical sensor and method of manufacturing. The MEMS optical sensor including a substrate having a base portion and a vertically extending support portion. The sensor further including a top plate having a compliant membrane configured to vibrate in response to acoustic waves, the top plate connected to the support portion and having a reflective surface. The sensor also includes a back plate connected to the support portion, the back plate having a grating portion positioned below the reflective surface portion and a base plate connected to the support portion at a position below the back plate. A light emitter, a light detector and circuitry operable to tilt the top plate and the back plate with respect to the base plate so as to direct the reflected laser light toward the light detector are further provided.
Abstract translation: 微机电系统（MEMS）光学传感器，使用MEMS光学传感器检测声音的方法和制造方法。 MEMS光学传感器包括具有基部和垂直延伸的支撑部的基板。 所述传感器还包括顶板，所述顶板具有构造为响应于声波而振动的柔性膜，所述顶板连接到所述支撑部分并且具有反射表面。 传感器还包括连接到支撑部分的背板，背板具有位于反射表面部分下方的光栅部分和在背板下方的位置处连接到支撑部分的基板。 还提供了一种发光器，光检测器和可操作以相对于基板倾斜顶板和背板以便将反射的激光引向光检测器的电路。
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公开(公告)号：US10667038B2
公开(公告)日：2020-05-26
申请号：US15499784
申请日：2017-04-27
Applicant: Apple Inc.
Inventor： Janhavi S. Agashe , Jae H. Lee , Ruchir M. Dave
Abstract: A micro-electro-mechanical system (MEMS) microphone assembly including an enclosure having a top side and a bottom side that define a first chamber having a first volume and an acoustic inlet port formed through one of the top side or the bottom side. The assembly further including a MEMS microphone mounted within the first chamber, the MEMS microphone defining a second chamber having a second volume and a diaphragm having a first side interfacing with the first chamber and a second side interfacing with the second chamber. The assembly also including an acoustically absorbent material within one of the first chamber or the second chamber, the acoustically absorbent material to cause a simulated acoustic enlargement of the first volume or the second volume, respectively.
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公开(公告)号：US10149032B2
公开(公告)日：2018-12-04
申请号：US15726306
申请日：2017-10-05
Applicant: Apple Inc.
Inventor： Janhavi S. Agashe , Anthony D. Minervini , Ruchir M. Dave , Jae H. Lee
Abstract: A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.
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