公开(公告)号：US07680376B2

公开(公告)日：2010-03-16

申请号：US11771642

申请日：2007-06-29

Applicant: Andreas Goebel ,  Gregory L. Wojcik ,  Lawrence C. West

Inventor： Andreas Goebel ,  Gregory L. Wojcik ,  Lawrence C. West

IPC: G02B6/30 ,  G02B6/26 ,  G02B6/42

CPC classification number: G02B27/62

Abstract: Methods are disclosed of fabricating an optical assembly. An active optical element is disposed near or on a first surface of a slab of optical material. A passive optical element is formed on a second surface of the slab, with the second surface being substantially parallel to the first surface. An optical axis of the passive optical element is aligned with an optical path between the passive optical element and an active region of the active optical element using a lithographic alignment process.

Abstract translation: 公开了制造光学组件的方法。 有源光学元件设置在光学材料板的第一表面附近或之上。 无源光学元件形成在板坯的第二表面上，第二表面基本上平行于第一表面。 使用光刻对准过程，无源光学元件的光轴与无源光学元件与有源光学元件的有源区域之间的光路对准。

公开(公告)号：US20090252495A1

公开(公告)日：2009-10-08

申请号：US12403967

申请日：2009-03-13

Applicant: Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

Inventor： Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

IPC: H04J14/00 ,  H04J14/02 ,  G02B6/34

CPC classification number: G02B6/4246 ,  G02B6/2931 ,  G02B6/2938

Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.

Abstract translation: 公开了将光纤传输到硅衬底和多个检测器中的方法和结构。 硅衬底具有两个间隔开的表面和与其中一个表面相邻设置的衍射元件。 每个光信号对应于多个波长中的一个。 沿着穿过第一表面的路径将光信号引导到硅衬底中以入射到衍射元件上。 该路径与第一表面和/或衍射元件大致正交，该衍射元件使光信号成角度地分离，使得每个波长以与波长相关的方向穿过基板。 每个光信号从第一表面转向第二表面以入射到不同的光学元件上，这些光学元件将它们大致垂直于第一表面入射到其中一个检测器上。

公开(公告)号：US08023782B2

公开(公告)日：2011-09-20

申请号：US12403967

申请日：2009-03-13

Applicant: Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

Inventor： Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

IPC: G02B6/28 ,  G02B6/34 ,  G02B6/26 ,  G02B6/42 ,  H04J14/00 ,  H04J14/02

CPC classification number: G02B6/4246 ,  G02B6/2931 ,  G02B6/2938

Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.

Abstract translation: 公开了将光纤传输到硅衬底和多个检测器中的方法和结构。 硅衬底具有两个间隔开的表面和与其中一个表面相邻设置的衍射元件。 每个光信号对应于多个波长中的一个。 沿着穿过第一表面的路径将光信号引导到硅衬底中以入射到衍射元件上。 该路径与第一表面和/或衍射元件大致正交地定向，该衍射元件使光信号成角度地分离，使得每个波长沿着与第一表面波长相关的方向穿过衬底。 每个光信号从第一表面转向第二表面以入射到不同的光学元件上，这些光学元件将它们大致垂直于第一表面入射到其中一个检测器上。

公开(公告)号：US07869672B2

公开(公告)日：2011-01-11

申请号：US11771716

申请日：2007-06-29

Applicant: Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

Inventor： Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

IPC: G02B6/28 ,  G02B6/12 ,  G02B6/26 ,  G02B6/34 ,  G02B6/42 ,  G02B5/18 ,  H04J14/00 ,  H04J14/02

CPC classification number: G02B6/4246 ,  G02B6/2931 ,  G02B6/2938

Abstract: An optical assembly is formed with a silicon substrate having a first surface and a second surface confronting the first surface. A reflective coating is formed over the first surface. Multiple diffraction gratings are formed integrally within the second surface of the silicon substrate. An optical absorber is formed over the second surface between the diffraction gratings.

Abstract translation: 光学组件形成有具有与第一表面相对的第一表面和第二表面的硅衬底。 在第一表面上形成反射涂层。 多个衍射光栅一体地形成在硅衬底的第二表面内。 在衍射光栅之间的第二表面上形成光吸收体。

公开(公告)号：US20080124084A1

公开(公告)日：2008-05-29

申请号：US11771716

申请日：2007-06-29

Applicant: Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

Inventor： Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

IPC: H04J14/02

CPC classification number: G02B6/4246 ,  G02B6/2931 ,  G02B6/2938

Abstract: An optical assembly is formed with a silicon substrate having a first surface and a second surface confronting the first surface. A reflective coating is formed over the first surface. Multiple diffraction gratings are formed integrally within the second surface of the silicon substrate. An optical absorber is formed over the second surface between the diffraction gratings.

Abstract translation: 光学组件形成有具有与第一表面相对的第一表面和第二表面的硅衬底。 在第一表面上形成反射涂层。 多个衍射光栅一体地形成在硅衬底的第二表面内。 在衍射光栅之间的第二表面上形成光吸收体。

公开(公告)号：US07760980B2

公开(公告)日：2010-07-20

申请号：US11514291

申请日：2006-08-31

Applicant: Lawrence C. West ,  Gregory L. Wojcik ,  Francisco A. Leon ,  Yonah Cho ,  Andreas Goebel

Inventor： Lawrence C. West ,  Gregory L. Wojcik ,  Francisco A. Leon ,  Yonah Cho ,  Andreas Goebel

IPC: G02B6/10 ,  G02B6/13

CPC classification number: G02B6/132 ,  G02B6/12004 ,  G02B6/1347 ,  G02B6/136 ,  G02B2006/12097 ,  G02B2006/121 ,  G02B2006/12123 ,  G02B2006/12176 ,  H01L31/02327 ,  H01L31/1812 ,  Y02E10/50

Abstract: A method of fabricating on a substrate an optical detector in an optical waveguide, the method involving: forming at least one layer on a surface of the substrate, said at least one layer comprising SiGe; implanting an impurity into the at least one layer over a first area to form a detector region for the optical detector; etching into the at least one layer in a first region and a second region to form a ridge between the first and second regions, said ridge defining the optical detector and the optical waveguide; filling the first and second regions with a dielectric material having a lower refractive index than SiGe; and after filling the first and second regions with the dielectric material, removing surface material to form a planarized upper surface.

Abstract translation: 一种在光波导中在基板上制造光检测器的方法，所述方法包括：在所述基板的表面上形成至少一层，所述至少一层包括SiGe; 在第一区域上将杂质注入到所述至少一个层中以形成用于所述光学检测器的检测器区域; 在第一区域和第二区域中蚀刻到所述至少一个层中以在所述第一和第二区域之间形成脊，所述脊限定所述光学检测器和所述光波导; 用具有比SiGe低的折射率的电介质材料填充第一和第二区域; 并且在用电介质材料填充第一和第二区域之后，去除表面材料以形成平坦化的上表面。

公开(公告)号：US07505647B2

公开(公告)日：2009-03-17

申请号：US11771760

申请日：2007-06-29

Applicant: Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

Inventor： Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

IPC: G02B6/28 ,  H04J14/00 ,  H04J14/02

CPC classification number: G02B6/4246 ,  G02B6/2931 ,  G02B6/2938

Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.

Abstract translation: 公开了将光纤传输到硅衬底和多个检测器中的方法和结构。 硅衬底具有两个间隔开的表面和与其中一个表面相邻设置的衍射元件。 每个光信号对应于多个波长中的一个。 沿着穿过第一表面的路径将光信号引导到硅衬底中以入射到衍射元件上。 该路径与第一表面和/或衍射元件大致正交，该衍射元件使光信号成角度地分离，使得每个波长以与波长相关的方向穿过基板。 每个光信号从第一表面转向第二表面以入射到不同的光学元件上，这些光学元件将它们大致垂直于第一表面入射到其中一个检测器上。

公开(公告)号：US20090269878A1

公开(公告)日：2009-10-29

申请号：US12420558

申请日：2009-04-08

Applicant: Francisco A. Leon ,  Lawrence C. West ,  Yuichi Wada ,  Gregory L. Wojcik ,  Stephen Moffatt

Inventor： Francisco A. Leon ,  Lawrence C. West ,  Yuichi Wada ,  Gregory L. Wojcik ,  Stephen Moffatt

IPC: H01L21/20

CPC classification number: G02B6/12004 ,  G02B2006/12061 ,  H01L31/0232 ,  H01L31/0288 ,  H01L31/105 ,  H01L31/1812 ,  Y02E10/50

Abstract: A method of fabricating a detector that involves: forming a trench in a substrate, the substrate having an upper surface; forming a first doped semiconductor layer on the substrate and in the trench; forming a second semiconductor layer on the first doped semiconductor layer and extending into the trench, the second semiconductor layer having a conductivity that is less than the conductivity of the first doped semiconductor layer; forming a third doped semiconductor layer on the second semiconductor layer and extending into the trench; removing portions of the first, second and third layers that are above a plane defined by the surface of the substrate to produce an upper, substantially planar surface and expose an upper end of the first doped semiconductor layer in the trench; forming a first electrical contact to the first semiconductor doped layer; and forming a second electrical contact to the third semiconductor doped layer.

Abstract translation: 一种制造检测器的方法，包括：在衬底中形成沟槽，所述衬底具有上表面; 在所述衬底和所述沟槽中形成第一掺杂半导体层; 在所述第一掺杂半导体层上形成第二半导体层并延伸到所述沟槽中，所述第二半导体层的导电率小于所述第一掺杂半导体层的导电性; 在所述第二半导体层上形成第三掺杂半导体层并延伸到所述沟槽中; 去除在由衬底的表面限定的平面之上的第一层，第二层和第三层的部分，以产生上部基本平坦的表面，并且暴露沟槽中的第一掺杂半导体层的上端; 形成第一电接触到第一半导体掺杂层; 以及向所述第三半导体掺杂层形成第二电接触。

公开(公告)号：US07298941B2

公开(公告)日：2007-11-20

申请号：US11354267

申请日：2006-02-14

Applicant: Edward L. Palen ,  Gregory L. Wojcik ,  Lawrence C. West

Inventor： Edward L. Palen ,  Gregory L. Wojcik ,  Lawrence C. West

IPC: G02B6/32 ,  B29B11/00

CPC classification number: G02B6/4214 ,  G02B6/4204 ,  G02B6/4206 ,  G02B6/423 ,  G02B6/4249

Abstract: An optoelectronic circuit including: an IC chip made up of a substrate in which an optical waveguide and a mirror have been fabricated, the substrate having a first lens formed thereon, wherein the mirror is aligned with the optical waveguide and the first lens is aligned with the mirror to form an optical path connecting the first lens, the mirror, and the optical waveguide; and an optical coupler including a second lens, the optical coupler affixed to the substrate and positioned to align the second lens with the first lens so as to couple an optical signal into or out of the optical waveguide within the IC chip.

Abstract translation: 一种光电子电路，包括：由其上制造有光波导和反射镜的基板构成的IC芯片，所述基板具有形成在其上的第一透镜，其中所述反射镜与所述光波导对准，并且所述第一透镜与 所述反射镜形成连接所述第一透镜，所述反射镜和所述光波导的光路; 以及包括第二透镜的光耦合器，所述光耦合器固定到所述基板并且被定位成将所述第二透镜与所述第一透镜对准，以将光信号耦合到所述IC芯片内的光波导中或从所述IC芯片中的所述光波导耦合。

公开(公告)号：US07075165B2

公开(公告)日：2006-07-11

申请号：US10856750

申请日：2004-05-28

Applicant: Francisco A. Leon ,  Lawrence C. West ,  Yuichi Wada ,  Gregory L. Wojcik ,  Stephen Moffatt

Inventor： Francisco A. Leon ,  Lawrence C. West ,  Yuichi Wada ,  Gregory L. Wojcik ,  Stephen Moffatt

IPC: H01L31/075

CPC classification number: G02B6/12004 ,  G02B2006/12061 ,  H01L31/0232 ,  H01L31/0288 ,  H01L31/105 ,  H01L31/1812 ,  Y02E10/50

Abstract: A method of fabricating a detector that involves: forming a trench in a substrate, the substrate having an upper surface; forming a first doped semiconductor layer on the substrate and in the trench; forming a second semiconductor layer on the first doped semiconductor layer and extending into the trench, the second semiconductor layer having a conductivity that is less than the conductivity of the first doped semiconductor layer; forming a third doped semiconductor layer on the second semiconductor layer and extending into the trench; removing portions of the first, second and third layers that are above a plane defined by the surface of the substrate to produce an upper, substantially planar surface and expose an upper end of the first doped semiconductor layer in the trench; forming a first electrical contact to the first semiconductor doped layer; and forming a second electrical contact to the third semiconductor doped layer.

Abstract translation: 一种制造检测器的方法，包括：在衬底中形成沟槽，所述衬底具有上表面; 在所述衬底和所述沟槽中形成第一掺杂半导体层; 在所述第一掺杂半导体层上形成第二半导体层并延伸到所述沟槽中，所述第二半导体层的导电率小于所述第一掺杂半导体层的导电性; 在所述第二半导体层上形成第三掺杂半导体层并延伸到所述沟槽中; 去除在由衬底的表面限定的平面之上的第一层，第二层和第三层的部分，以产生上部基本平坦的表面，并且暴露沟槽中的第一掺杂半导体层的上端; 形成第一电接触到第一半导体掺杂层; 以及向所述第三半导体掺杂层形成第二电接触。