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公开(公告)号：US11579459B2
公开(公告)日：2023-02-14
申请号：US16768506
申请日：2018-05-02
Applicant: Agilent Technologies, Inc.
Inventor： Sean M. Kent , Lindsay Buck
IPC: G01J3/12 , G02B27/42 , G01J3/02 , G01J3/18 , G01J3/26 , G02B17/06 , G02B27/00 , G02B27/10 , G02B27/30
Abstract: A polychromator system comprising: an optical element defining an aperture; a collimation mirror for receiving light via the aperture and reflecting substantially collimated light; at least a first dispersive optical component and a second dispersive optical component, each configured to disperse the substantially collimated light received from the collimation mirror by different amounts for different wavelengths and to provide cross-dispersed light having different wavelengths of light spaced along a first and second axis; and a focus mirror positioned to focus the cross-dispersed light onto a 2-D array detector to provide a plurality of aperture images of the aperture at a respective plurality of regions of the detector, each of the plurality of aperture images associated with a respective wavelength of the cross-dispersed light. Either one or both of the collimation mirror and the focus mirror is a freeform mirror having a reflective surface configured to mitigate effects of optical aberrations of the polychromator system over a plurality of the wavelengths of the cross-dispersed light along the first axis and the second axis and thereby optimise the resolution of the plurality of aperture images associated with the plurality of the wavelengths along the first axis and the second axis.
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Patent Agency Ranking
公开(公告)号：US20200379270A1
公开(公告)日：2020-12-03
申请号：US16768506
申请日：2018-05-02
Applicant: Agilent Technologies, Inc.
Inventor： Sean M. Kent , Lindsay Buck
IPC: G02B27/42 , G02B17/06 , G02B27/30 , G02B27/10 , G02B27/00 , G01J3/12 , G01J3/18 , G01J3/26 , G01J3/02
Abstract: A polychromator system comprising: an optical element defining an aperture; a collimation mirror for receiving light via the aperture and reflecting substantially collimated light; at least a first dispersive optical component and a second dispersive optical component, each configured to disperse the substantially collimated light received from the collimation mirror by different amounts for different wavelengths and to provide cross-dispersed light having different wavelengths of light spaced along a first and second axis; and a focus mirror positioned to focus the cross-dispersed light onto a 2-D array detector to provide a plurality of aperture images of the aperture at a respective plurality of regions of the detector, each of the plurality of aperture images associated with a respective wavelength of the cross-dispersed light. Either one or both of the collimation mirror and the focus mirror is a freeform mirror having a reflective surface configured to mitigate effects of optical aberrations of the polychromator system over a plurality of the wavelengths of the cross-dispersed light along the first axis and the second axis and thereby optimise the resolution of the plurality of aperture images associated with the plurality of the wavelengths along the first axis and the second axis.
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公开(公告)号：US20170343414A1
公开(公告)日：2017-11-30
申请号：US15679969
申请日：2017-08-17
Applicant: AGILENT TECHNOLOGIES, INC.
Inventor： Michael Bolles , Yin Sheng Sun , Lindsay Buck , Glyn Russell
CPC classification number: G01J3/10 , G01J3/0205 , G01J3/0208 , G01J3/12 , G01J3/443 , G01J2003/1217
Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.
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公开(公告)号：US09752933B2
公开(公告)日：2017-09-05
申请号：US14614381
申请日：2015-02-04
Applicant: AGILENT TECHNOLOGIES, INC.
Inventor： Michael Bolles , Yin Sheng Sun , Lindsay Buck , Glyn Russell
CPC classification number: G01J3/10 , G01J3/0205 , G01J3/0208 , G01J3/12 , G01J3/443 , G01J2003/1217
Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.
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公开(公告)号：US10401221B2
公开(公告)日：2019-09-03
申请号：US15679969
申请日：2017-08-17
Applicant: AGILENT TECHNOLOGIES, INC.
Inventor： Michael Bolles , Yin Sheng Sun , Lindsay Buck , Glyn Russell
Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.
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公开(公告)号：US20150138548A1
公开(公告)日：2015-05-21
申请号：US14614381
申请日：2015-02-04
Applicant: AGILENT TECHNOLOGIES, INC.
Inventor： Michael Bolles , Yin Sheng Sun , Lindsay Buck , Glyn Russell
CPC classification number: G01J3/10 , G01J3/0205 , G01J3/0208 , G01J3/12 , G01J3/443 , G01J2003/1217
Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.
Abstract translation: 光发射光谱仪系统包括光源和二向色光束组合器。 光源沿第一方向发射第一光，而在与第一方向不同的第二方向上发射第二光。 二向色光束组合器经由第一光路接收第一光，经由第二光路接收第二光，将第一光的一部分反射到光检测和测量装置的入射孔中，并将第二光的一部分透射 入口孔径，同时能够分析和测量第一和第二光特性。 反射到入口孔中的第一光的部分主要具有波长在第一波长范围内的波长，并且透射入入口的第二光的部分主要具有不同于第一波长范围的第二波长范围的波长。
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