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公开(公告)号：US09200885B2
公开(公告)日：2015-12-01
申请号：US14561425
申请日：2014-12-05
Applicant: AGILENT TECHNOLOGIES, INC.
Inventor： Gregg Ressler , Jeffrey H. Saller
CPC classification number: G01B9/02 , G01B9/02015 , G01J3/06 , G01J3/45 , G01J3/4535 , G01J2003/061 , G01N21/35 , G01N2021/3595 , G01N2201/061 , G01N2201/10 , G02B7/182
Abstract: An interferometer includes a first assembly having a base, a beam splitter assembly to split light into first and second portions, and a fixed mirror for reflecting the first portion of light; and a second assembly movable with respect to the first assembly, and having first and second scan carriages, and a movable mirror connected to the second scan carriage for reflecting the second portion of light. The beam splitter assembly combines the reflected first and second portions of light into a recombined radiation beam. Inner bearing flexures enable movement of the first scan carriage relative to the base, and outer bearing flexures enable movement of the second scan carriage relative to the first scan carriage, such that a plane containing the movable mirror is maintained parallel to multiple planes containing the movable mirror at respective distances between the second and first assemblies during scan movement of the movable mirror.
Abstract translation: 干涉仪包括具有底座的第一组件，将光分成第一和第二部分的分束器组件以及用于反射第一部分光的固定镜; 以及第二组件，其可相对于所述第一组件移动，并且具有第一和第二扫描支架，以及连接到所述第二扫描托架的用于反射所述第二部分光的可移动反射镜。 分束器组件将反射的第一和第二部分光合并成复合辐射束。 内部轴承挠曲能够使第一扫描滑架相对于基座移动，而外轴承挠曲使第二扫描滑架相对于第一扫描滑架能够移动，使得包含可移动反射镜的平面保持平行于包含可移动的多个平面的多个平面 在可移动镜的扫描运动期间在第二组件和第一组件之间的相应距离处的镜子。
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公开(公告)号：US08933406B2
公开(公告)日：2015-01-13
申请号：US13723274
申请日：2012-12-21
Applicant: Agilent Technologies, Inc.
Inventor： Gregg Ressler , Jeffrey H. Saller
CPC classification number: G01B9/02 , G01B9/02015 , G01J3/06 , G01J3/45 , G01J3/4535 , G01J2003/061 , G01N21/35 , G01N2021/3595 , G01N2201/061 , G01N2201/10 , G02B7/182
Abstract: An interferometer includes a fixed assembly including a base, a beam splitter assembly and a fixed mirror, and a movable assembly including an upper scan carriage, a lower scan carriage and a movable mirror connected to the lower scan carriage. The pair of inner bearing flexures is connected to the base and the upper scan carriage, enabling movement of the upper scan carriage relative to the base, and the pair of outer bearing flexures is connected to the upper and lower scan carriages, enabling movement of the lower scan carriage relative to the upper scan carriage. The movement of the upper and lower scan carriages enable a scan movement of the movable mirror in a scan direction restricted such that the scan movement maintains a plane containing the movable mirror parallel to planes containing the movable mirror at respective distances between the movable and fixed assemblies during the scan movement.
Abstract translation: 干涉仪包括固定组件，其包括基座，分束器组件和固定反射镜，以及包括上扫描滑架，下扫描滑架和连接到下扫描滑架的可移动反射镜的可移动组件。 一对内轴承挠曲件连接到基座和上扫描托架，使得上扫描托架能够相对于基座移动，并且一对外轴承挠曲件连接到上扫描支架和下扫描支架， 相对于上扫描托架的下扫描托架。 上扫描支架和下扫描支架的移动使扫描方向的扫描运动受到限制，使得扫描运动将包含可移动镜的平面平行于可移动反射镜的平面保持在可移动和固定组件之间的相应距离处 在扫描运动期间。
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公开(公告)号：US20150083916A1
公开(公告)日：2015-03-26
申请号：US14561425
申请日：2014-12-05
Applicant: AGILENT TECHNOLOGIES, INC.
Inventor： Gregg Ressler , Jeffrey H. Saller
CPC classification number: G01B9/02 , G01B9/02015 , G01J3/06 , G01J3/45 , G01J3/4535 , G01J2003/061 , G01N21/35 , G01N2021/3595 , G01N2201/061 , G01N2201/10 , G02B7/182
Abstract: An interferometer includes a first assembly having a base, a beam splitter assembly to split light into first and second portions, and a fixed mirror for reflecting the first portion of light; and a second assembly movable with respect to the first assembly, and having first and second scan carriages, and a movable mirror connected to the second scan carriage for reflecting the second portion of light. The beam splitter assembly combines the reflected first and second portions of light into a recombined radiation beam. Inner bearing flexures enable movement of the first scan carriage relative to the base, and outer bearing flexures enable movement of the second scan carriage relative to the first scan carriage, such that a plane containing the movable mirror is maintained parallel to multiple planes containing the movable mirror at respective distances between the second and first assemblies during scan movement of the movable mirror.
Abstract translation: 干涉仪包括具有底座的第一组件，将光分成第一和第二部分的分束器组件以及用于反射第一部分光的固定镜; 以及第二组件，其可相对于所述第一组件移动，并且具有第一和第二扫描支架，以及连接到所述第二扫描托架的用于反射所述第二部分光的可移动镜。 分束器组件将反射的第一和第二部分光合并成复合辐射束。 内部轴承挠曲能够使第一扫描滑架相对于基座移动，而外轴承挠曲使第二扫描滑架相对于第一扫描滑架能够移动，使得包含可移动反射镜的平面保持平行于包含可移动的多个平面的多个平面 在可移动镜的扫描运动期间在第二组件和第一组件之间的相应距离处的镜子。
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