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公开(公告)号：US20220159817A1
公开(公告)日：2022-05-19
申请号：US17435861
申请日：2020-03-09
Applicant: ASML Netherlands B.V.
Inventor： Abhiram Lakshmi Ganesh Govindaraju , David Bessems , Sandeep Rai , Petrus Adrianus Willems , Serkan Kincal , Joshua Mark Lukens , Jon David Tedrow
Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.
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公开(公告)号：US11963285B2
公开(公告)日：2024-04-16
申请号：US17435861
申请日：2020-03-09
Applicant: ASML Netherlands B.V.
Inventor： Abhiram Lakshmi Ganesh Govindaraju , David Bessems , Sandeep Rai , Petrus Adrianus Willems , Serkan Kincal , Joshua Mark Lukens , Jon David Tedrow
CPC classification number: H05G2/006 , G03F7/70033 , H05G2/008
Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.
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公开(公告)号：US20230279974A1
公开(公告)日：2023-09-07
申请号：US18010312
申请日：2021-07-13
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Vikas Giridhar Telkar , Alexander Igorevich Ershov , Theodorus Wilhelmus Driessen , Serkan Kincal
IPC: F16L17/02
Abstract: A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket (1105) having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor (1160) can be seated in the gasket.
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公开(公告)号：US12222050B2
公开(公告)日：2025-02-11
申请号：US18010312
申请日：2021-07-13
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Vikas Giridhar Telkar , Alexander Igorevich Ershov , Theodorus Wilhelmus Driessen , Serkan Kincal
Abstract: A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket (1105) having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor (1160) can be seated in the gasket.
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