公开(公告)号：US20230109695A1

公开(公告)日：2023-04-13

申请号：US17964783

申请日：2022-10-12

Applicant: ASML Netherlands B.V.

Inventor： Xuechen ZHU ,  Farshid TAZESH ,  Datong ZHANG ,  Weiming REN

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/28 ,  H01J37/05

Abstract: Some embodiments are related to a method of or apparatus for forming an image of a buried structure that includes: emitting primary charged particles from a source; receiving a plurality of secondary charged particles from a sample; and forming an image based on received secondary charged particles that have an energy within a first range.