公开(公告)号：US11906907B2

公开(公告)日：2024-02-20

申请号：US16765339

申请日：2018-11-27

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Derk Servatius Gertruda Brouns ,  Joshua Adams ,  Aage Bendiksen ,  Richard Jacobs ,  Andrew Judge ,  Veera Venkata Narasimha Narendra Phani Kottapalli ,  Joseph Harry Lyons ,  Theodorus Marinus Modderman ,  Manish Ranjan ,  Marcus Adrianus Van De Kerkhof ,  Xugang Xiong

IPC: G03F7/20 ,  G03F7/00 ,  G03F1/62 ,  G03F1/64

CPC classification number: G03F7/7085 ,  G03F1/62 ,  G03F1/64 ,  G03F7/70033 ,  G03F7/70891 ,  G03F7/70983

Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.