公开(公告)号：US20250044715A1

公开(公告)日：2025-02-06

申请号：US18717286

申请日：2022-12-05

Applicant: ASML NETHERLANDS B.V.

Inventor： Ahmet Burak CUNBUL ,  Ferry ZIJP ,  Teunis Willem TUKKER ,  Peter Fernand William Jozef DENDAS ,  Abraham Franciscus Hubertus VAN GESSEL

IPC: G03F9/00

Abstract: A projection unit for a level sensor, the projection unit including: a first light pipe having a first inlet configured to receive radiation from a source and a first outlet; and a second light pipe having a second inlet configured to receive the radiation from the first light pipe and a second outlet. The unit may include a lens device configured to receive radiation from the second outlet and to output radiation having a predetermined distribution of intensity and irradiance.