公开(公告)号：US20240355578A1

公开(公告)日：2024-10-24

申请号：US18761319

申请日：2024-07-02

Applicant: ASML NETHERLANDS B.V.

Inventor： Te-Sheng WANG ,  Szu-Po WANG ,  Kai-Yuan CHI

IPC: H01J37/22 ,  H01J37/28

CPC classification number: H01J37/222 ,  H01J37/28

Abstract: Disclosed are non-transitory computer-readable media, systems, and computer-implemented methods that describe obtaining hot spot (HS) location information with respect to a printed pattern; obtaining LFP search criteria for searching the printed pattern to determine a local focus point (LFP) for an imaging device; selecting a HS area in the printed pattern that contains a HS; and determining the LFP proximate to the HS area based on the LFP search criteria, the LFP not containing the HS.