公开(公告)号：US20230144419A1

公开(公告)日：2023-05-11

申请号：US18085338

申请日：2022-12-20

申请人： ASML NETHERLANDS B.V.

发明人： John Colin TRAVERS ,  Federico BELLI ,  Malte Christian BRAHMS ,  Andreas Johannes Antonius BROUNS ,  Ronald Franciscus Herman HUGERS

IPC分类号： H01S3/067 ,  G02F1/35 ,  G02B6/02 ,  G03F7/20

CPC分类号： H01S3/06741 ,  G02F1/3528 ,  G02B6/02328 ,  G03F7/70625

摘要： A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.

公开(公告)号：US20220069537A1

公开(公告)日：2022-03-03

申请号：US17460430

申请日：2021-08-30

申请人： ASML NETHERLANDS B.V.

发明人： John Colin TRAVERS ,  Federico BELLI ,  Malte Christian BRAHMS ,  Andreas Johannes Antonius BROUNS ,  Ronald Franciscus Herman HUGERS

IPC分类号： H01S3/067 ,  G02F1/35 ,  G03F7/20 ,  G02B6/02

摘要： A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.