公开(公告)号：US12105036B2

公开(公告)日：2024-10-01

申请号：US17276124

申请日：2019-08-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Jian Zhang ,  Ning Ye ,  DanJing Huang ,  Bin-Da Chan

IPC: G01N23/2251 ,  G01J1/42 ,  G06T7/00

CPC classification number: G01N23/2251 ,  G01J1/4257 ,  G06T7/001 ,  G01N2223/07 ,  G01N2223/418 ,  G01N2223/507 ,  G01N2223/6116 ,  G06T2207/10016 ,  G06T2207/10144 ,  G06T2207/30108

Abstract: A system and a method for monitoring a beam in an inspection system are provided. The system includes an image sensor configured to collect a sequence of images of a beam spot of a beam formed on a surface, each image of the sequence of images having been collected at a different exposure time of the image sensor, and a controller configured to combine the sequence of images to obtain a beam profile of the beam.