公开(公告)号：US20030209560A1

公开(公告)日：2003-11-13

申请号：US10144164

申请日：2002-05-10

Applicant: ASM Assembly Automation Ltd

Inventor： Hon Chiu Hui ,  Wing Fai Lam ,  Ka Yee Mak ,  Man Lai Manly Chau

IPC: G01F011/00

CPC classification number: H01L21/67253 ,  B05C11/1005 ,  H01L21/6715 ,  H01L24/83 ,  H01L2224/83 ,  H01L2924/12042 ,  H01L2924/00

Abstract: The invention provides an apparatus and method for dispensing material onto a substrate. The apparatus comprises a dispensing system having a dipenser and a control system adapted to adjust a quantity of material to be dispensed onto the substrate. It also includes an image capturing system adapted to acquire an image of the material that is dispensed onto the substrate, a measuring system to analyze the image and measure the quantity of material dispensed, and a compensation system adapted to provide a correction signal to the control system to vary the quantity of material dispensed.

Abstract translation: 本发明提供了一种用于将材料分配到基底上的装置和方法。 该装置包括具有二次分配器和控制系统的分配系统，该系统适于调整待分配到基底上的材料的量。 它还包括适于获取分配到基板上的材料的图像的图像捕获系统，用于分析图像并测量分配的材料量的测量系统，以及适于向控制器提供校正信号的补偿系统 系统改变分配的材料的数量。

公开(公告)号：US20040175832A1

公开(公告)日：2004-09-09

申请号：US10379832

申请日：2003-03-03

Applicant: ASM Assembly Automation Ltd

Inventor： Hon Chiu Hui ,  Wing Fai Lam ,  Lim Pun Kong ,  Ka Yee Mak ,  Ka Yin Lee

IPC: B01L003/00

CPC classification number: H01L21/67253 ,  B01L3/0241 ,  G01F11/006 ,  G01F25/0084 ,  G01N35/1016 ,  H01L21/67126 ,  Y10T436/10 ,  Y10T436/2575

Abstract: The invention provides an apparatus and method for calibrating a dispensing system. A dispenser dispenses a controlled quantity of material into a container for receiving material. A system, preferably a vision system comprising an image capturing device and an imaging system, is adapted to capture an image of a physical dimension of a quantity of dispensed material in a given time. The physical dimension may be a width of a top surface area, a height or a cross-sectional area of the dispensed material. A calibrating system is adapted to calculate a volume of the quantity of material based upon said physical dimension.

Abstract translation: 本发明提供了一种用于校准分配系统的装置和方法。 分配器将可控量的材料分配到用于接收材料的容器中。 优选地，包括图像捕获装置和成像系统的视觉系统的系统适于在给定时间内捕获一批分配材料的物理尺寸的图像。 物理尺寸可以是分配材料的顶表面积，高度或横截面面积的宽度。 校准系统适于基于所述物理尺寸计算材料量的体积。