公开(公告)号：US20040175832A1

公开(公告)日：2004-09-09

申请号：US10379832

申请日：2003-03-03

Applicant: ASM Assembly Automation Ltd

Inventor： Hon Chiu Hui ,  Wing Fai Lam ,  Lim Pun Kong ,  Ka Yee Mak ,  Ka Yin Lee

IPC: B01L003/00

CPC classification number: H01L21/67253 ,  B01L3/0241 ,  G01F11/006 ,  G01F25/0084 ,  G01N35/1016 ,  H01L21/67126 ,  Y10T436/10 ,  Y10T436/2575

Abstract: The invention provides an apparatus and method for calibrating a dispensing system. A dispenser dispenses a controlled quantity of material into a container for receiving material. A system, preferably a vision system comprising an image capturing device and an imaging system, is adapted to capture an image of a physical dimension of a quantity of dispensed material in a given time. The physical dimension may be a width of a top surface area, a height or a cross-sectional area of the dispensed material. A calibrating system is adapted to calculate a volume of the quantity of material based upon said physical dimension.

Abstract translation: 本发明提供了一种用于校准分配系统的装置和方法。 分配器将可控量的材料分配到用于接收材料的容器中。 优选地，包括图像捕获装置和成像系统的视觉系统的系统适于在给定时间内捕获一批分配材料的物理尺寸的图像。 物理尺寸可以是分配材料的顶表面积，高度或横截面面积的宽度。 校准系统适于基于所述物理尺寸计算材料量的体积。