公开(公告)号：US20190135704A1

公开(公告)日：2019-05-09

申请号：US15807508

申请日：2017-11-08

Applicant: APPLIED Materials, Inc.

Inventor： Kaushal GANGAKHEDKAR ,  Jennifer Y. SUN ,  Xiao-Ming HE

IPC: C04B35/64 ,  C04B35/622 ,  H01J37/32

CPC classification number: C04B35/64 ,  C04B35/50 ,  C04B35/505 ,  C04B35/62222 ,  C04B41/009 ,  C04B41/5031 ,  C04B41/5032 ,  C04B41/5042 ,  C04B41/5045 ,  C04B41/5055 ,  C04B41/87 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3244 ,  C04B2235/3246 ,  C04B2235/3418 ,  C04B2235/445 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  H01J37/32467 ,  H01J37/32495 ,  C04B35/00 ,  C04B35/10 ,  C04B35/581 ,  C04B35/44 ,  C04B41/0072 ,  C04B41/4527

Abstract: Methods comprise performing two or more thermal cycles on an article comprising a body and a ceramic coating. Each thermal cycle of the two or more thermal cycles comprise heating the ceramic article to a target temperature at a first ramping rate. Each thermal cycle further comprises maintaining the article at the target temperature for a first duration of time and then cooling the article to a second target temperature at a second ramping rate. The method further comprises submerging the article in a bath for a second duration of time to remove the particles from the ceramic coating.