公开(公告)号：US20210176831A1

公开(公告)日：2021-06-10

申请号：US17106735

申请日：2020-11-30

申请人： APPLIED MATERIALS, INC.

发明人： Pingyan LEI ,  Dien-Yeh WU ,  Jallepally RAVI ,  Manjunatha KOPPA ,  Ambarish TOORIHAL ,  Sandesh YADAMANE ,  Vinod Konda PURATHE ,  Xiaoxiong YUAN

IPC分类号： H05B3/48 ,  C23C14/54 ,  C23C16/458 ,  C23C16/455 ,  H05B3/14

摘要： Embodiments of a lid heater for a deposition chamber are provided herein. In some embodiments, a lid heater for a deposition chamber includes a ceramic heater body having a first side opposite a second side, wherein the ceramic heater body includes a first plurality of gas channels extending from one or more first gas inlets on the first side, wherein each of the one or more first gas inlets extend to a plurality of first gas outlets on the second side; a heating element embedded in the ceramic heater body; and an RF electrode embedded in the ceramic heater body proximate the second side, wherein the first plurality of gas channels extend through the RF electrode.

公开(公告)号：US20210032753A1

公开(公告)日：2021-02-04

申请号：US16934343

申请日：2020-07-21

申请人： APPLIED MATERIALS, INC.

发明人： Jallepally RAVI ,  Dien-Yeh WU ,  Pingyan LEI ,  Manjunatha P. KOPPA ,  Vinod Konda PURATHE ,  Takashi KURATOMI ,  Mei CHANG ,  Xiaoxiong YUAN

IPC分类号： C23C16/455 ,  H01J37/32

摘要： Methods and apparatus for gas distribution in a process chamber leverage dual electrodes to provide RF power and an RF ground return in a single showerhead. In some embodiments, the apparatus includes a showerhead composed of a non-metallic material with a first gas channel and a second gas channel, the first gas channel and the second gas channel being independent of each other, and the first gas channel including a plurality of through holes from a top surface of the showerhead to a bottom surface of the showerhead and the second gas channel including a plurality of holes on the bottom surface of the showerhead connected to one or more gas inlets on a side of the showerhead, a first electrode embedded in the showerhead near a top surface of the showerhead, and a second electrode embedded in the showerhead near a bottom surface of the showerhead.

公开(公告)号：US20210130956A1

公开(公告)日：2021-05-06

申请号：US17078664

申请日：2020-10-23

申请人： APPLIED MATERIALS, INC.

发明人： Pingyan LEI ,  Dien-Yeh WU ,  Jallepally RAVI ,  Takashi KURATOMI ,  Xiaoxiong YUAN ,  Manjunatha KOPPA ,  Vinod Konda PURATHE

IPC分类号： C23C16/455

摘要： Embodiments of showerheads are provided herein. In some embodiments, a showerhead for use in a process chamber includes a gas distribution plate having an upper surface and a lower surface; a plurality of channels extending through the gas distribution plate substantially perpendicular to the lower surface; a plurality of first gas delivery holes extending from the upper surface to the lower surface between adjacent channels of the plurality of channels to deliver a first process gas through the gas distribution plate; and a plurality of second gas delivery holes extending from the plurality of channels to the lower surface to deliver a second process gas therethrough without mixing with the first process gas.

公开(公告)号：US20190032210A1

公开(公告)日：2019-01-31

申请号：US15661441

申请日：2017-07-27

申请人： APPLIED MATERIALS, INC.

发明人： Muhannad MUSTAFA ,  Muhammad M. RASHEED ,  Mario Dan SANCHEZ ,  Yu CHANG ,  William Kuang ,  Vinod Konda PURATHE ,  Manjunatha KOPPA

IPC分类号： C23C16/455 ,  G01K7/16 ,  C23C16/458

摘要： Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.