公开(公告)号：US20210249239A1

公开(公告)日：2021-08-12

申请号：US17167469

申请日：2021-02-04

Applicant: APPLIED MATERIALS, INC.

Inventor： Naman APURVA ,  Lara A. HAWRYLCHAK ,  Mahesh RAMAKRISHNA ,  Sriharish SRINIVASAN ,  Prashant AGARWAL

IPC: H01J37/32 ,  H01L21/67

Abstract: Embodiments of exhaust liner systems are provided herein. In some embodiments, an exhaust liner system for use in a process chamber includes a lower exhaust liner having an annular body with a central opening; an upper flange, a central flange, and a lower flange extending outward from the annular body, wherein the lower flange and the central flange partially define a first plenum, and wherein the central flange and the upper flange partially define a second plenum; a plurality of exhaust holes from the central opening to the first plenum; and at least one cutout in the central flange to provide a flow path from the first plenum to the second plenum, wherein the lower exhaust liner defines a gas flow path from the central opening to the first plenum via the plurality of exhaust holes and from the first plenum to the second plenum via the least one cutout.

公开(公告)号：US20220013336A1

公开(公告)日：2022-01-13

申请号：US16926104

申请日：2020-07-10

Applicant: Applied Materials, Inc.

Inventor： Jian WU ,  Lara A. HAWRYLCHAK ,  Ren-Guan DUAN ,  Bernard L. HWANG ,  Malcolm J. BEVAN ,  Wei LIU

IPC: H01J37/32 ,  H01L21/683 ,  B08B7/00

Abstract: A method and apparatus for the use of hydrogen plasma treatments is described herein. The process chamber includes a plurality of chamber components. The plurality of chamber components may be coated with a yttrium zirconium oxide composition, such as a Y2O3—ZrO2 solid solution. Some of the plurality of chamber components are replaced with a bulk yttrium zirconium oxide ceramic. Yet other chamber components are replaced with similar components of different materials.